A simple method for formation of CdS nanoparticles on the surface of carbon nanotubes (CNTs) aligned perpendicularly to the silicon substrate has been developed. The size and shape of the CdS nanoparticles were found to depend on the temperature of a solution containing CdCl(2), (NH(2))(2)CS, and NH(3) and the deposition time. Electron microscopy study revealed a direct contact between CdS nanoparticles and CNT surface. X-Ray photoelectron spectroscopy examination of the CdS/CNT hybrid material detected surface oxidation of the grown nanoparticles.