Charge transfer and promoted oxygen uptake at alkalated Si(100) surfaces studied by Auger deexcitation of helium metastables

Enhanced-Oxidation and Interface Modification on 4H-SiC(0001) Substrate Using Alkaline Earth Metal

“…The catalytic oxidation phenomenon has been many reported on Si, SiC surface and so on [7][8][9]. S. Nishigaki et al proposed a mechanism based on the results of metastable de-excitation spectroscopy [9].…”

“…The catalytic oxidation phenomenon has been many reported on Si, SiC surface and so on [7][8][9]. S. Nishigaki et al proposed a mechanism based on the results of metastable de-excitation spectroscopy [9]. According to this mechanism, when catalytic oxidation occurs on Si surface, an ionic bond between alkali metal and oxygen is thermally broken by annealing, and then oxygen transfer to Si-bonded sites.…”