The
growth mechanism and characteristics of the nonpolar GaN/ZnO
heterostructure grown on the r-plane sapphire substrate
by using molecular beam epitaxy were studied. The crystal interaction
between GaN and ZnO epitaxial layers was clarified by using transmission
electron microscopy and X-ray diffraction. A new epitaxial relationship
of ZnGa2O4 (220)//GaN (101̅3̅) in
the normal surface direction was obtained in the GaN/ZnO heterostructure.
It was believed that the formation of ZnGa2O4 (220) was due to the recrystallization of the ZnO layer with Ga
atoms, which in turn resulted in the formation of semipolar-oriented
GaN. In addition, the main optical transition in the GaN/ZnO heterostructure
was attributed to the existence of the interface states and new ZnO:(Ga,N)
alloys.