Characterization of reactively sputtered permeation barrier materials on polymer substrates

Fahlteich, John; Schönberger, Waldemar; Fahland, Matthias; Schiller, Nina Glick

doi:10.1016/j.surfcoat.2011.01.045

Cited by 49 publications

(30 citation statements)

References 11 publications

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“…Earlier studies have shown that zinc-tin-oxide (ZTO) has very low water vapor transmission rates of 10 -2 g/(m 2 d) (measured at 38°C / 90% r.h.) compared to other sputtered single oxide barrier layers [6]. Based on that result, ZTO has been selected as barrier material for multi-layer deposition.…”

Section: Properties Of Single and Multi-layer Filmsmentioning

confidence: 99%

“…Common approaches for permeation barriers for organic electronics are based on either high quality, low defect single layers (using atomic layer deposition (ALD) [4], PECVD [5] or sputtering [6]) or multilayer stacks in which inorganic barrier layers and polymer interlayers are deposited alternately onto the substrate. The main advantages of multilayer stacks compared to single layers are [7] [8]:…”

Section: Introductionmentioning

confidence: 99%

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29.1: Ultra‐High Barriers for Encapsulation of Flexible Displays and Lighting Devices

Fahlteich

Amberg-Schwab

Noller

et al. 2013

Symp Digest of Tech Papers

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Section: Properties Of Single and Multi-layer Filmsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

29.1: Ultra‐High Barriers for Encapsulation of Flexible Displays and Lighting Devices

Fahlteich

Amberg-Schwab

Noller

et al. 2013

Symp Digest of Tech Papers

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“…The barrier system consists of reactively sputtered zinc‐tin‐oxide (ZTO, Zn 2 SnO 4 ) layers and wet‐coated ORMOCER ® hybrid polymer interlayers. ZTO was deposited in a reactive dual magnetron sputtering process as described in an earlier publication . ZTO was found to have the lowest water vapor transmission rate (while at the same time having a high deposition rate) among reactively sputtered oxide layers.…”

Section: Methodsmentioning

confidence: 99%

A Systematic Investigation of Permeation Barriers for Flexible Dye‐Sensitized Solar Cells

et al. 2016

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Dye solar cells (DSCs), in their flexible form, are prone to ageing due to ingress of gas as a result of the intrinsic permeability of polymer substrates. Thus, it is important to develop proper encapsulation strategies to limit degradation. Literature on flexible DSCs lacks comparative tests with different permeation barriers, including flexible ultrahigh barriers (UHB). We designed such tests and applied UHBs to flexible DSCs for the first time. We demonstrate that UHBs double the lifetime of cells with respect to those with none or less‐effective barriers. Degradation is due to a combination of electrolyte bleaching, dye detachment, and indium tin oxide (ITO) degradation. The reduced, though still noticeable, performance loss for UHB‐ and glass‐equipped cells can be mainly ascribed to lateral permeation of gas/water, suggesting that efficient solutions for edge encapsulation must be developed to extend lifetimes further.

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“…ZTO is a typical oxide semiconductor material, and it is commonly used as a transparent conductive oxide material or applied in transparent thin film transistors because of its unique characteristics such as having a wide band gap, low resistivity, high transparency in the visible region, a smooth surface, and a dense structure . Also, it has many advantages such as being a low‐cost, and nontoxic material, and having excellent thermal and chemical stability …”

Section: Introductionmentioning

confidence: 99%

Spectroscopic and Morphological Investigation of ZnSn Thin Films Obtained by Radio Frequency Cosputtering

Lee

Park

Kang

et al. 2017

Bulletin Korean Chem Soc

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In this study, Zn, Sn, and ZnSn (containing 20% of Sn) thin films were fabricated by radio frequency magnetron cosputtering and their properties had been studied with various analytical techniques. The X‐ray photoelectron spectroscopy results showed that the oxidation states of the elements in the alloy thin films change in comparison with the monometallic thin films, namely, Zn was more oxidized wheras Sn was less oxidized. The crystallinity and the conductivity of ZnSn thin films improved compared to monometallic thin films, which were confirmed by X‐ray diffraction (XRD) and four‐point probe. In ZnSn thin films, some Sn thin film formed secondary phase according to the Hume Rothery rules and the other was substituted into Zn sites in the wurtzite hexagonal structure of ZnO. Due to the lattice mismatch, the residual stress was generated and the preferred crystal growth was observed to overcome the stress. This was confirmed by the atomic force microscope and scanning electron microscope.

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Characterization of reactively sputtered permeation barrier materials on polymer substrates

Cited by 49 publications

References 11 publications

29.1: Ultra‐High Barriers for Encapsulation of Flexible Displays and Lighting Devices

29.1: Ultra‐High Barriers for Encapsulation of Flexible Displays and Lighting Devices

A Systematic Investigation of Permeation Barriers for Flexible Dye‐Sensitized Solar Cells

Spectroscopic and Morphological Investigation of ZnSn Thin Films Obtained by Radio Frequency Cosputtering

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