2013
DOI: 10.1063/1.4804315
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Characterization of Al/CuO nanoenergetic multilayer films integrated with semiconductor bridge for initiator applications

Abstract: This paper describes the ignition characteristics of Al/CuO nanoenergetic multilayer films (nEMFs) integrated with semiconductor bridge (SCB). The as-deposited Al/CuO nEMFs were identified with SEM and differential scanning calorimetry. Results show that distinct Al/CuO nEMFs are sputter deposited in a layered geometry, and the Al/CuO nEMFs gives a reaction heat equal to 2181 J/g. The firing experiments show that Al/CuO nEMFs have no influence on the electrical properties of SCB. Furthermore, the rapid combust… Show more

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Cited by 51 publications
(29 citation statements)
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“…In particular, DC magnetron-sputtering has developed rapidly over the last decade to become a standard manufacturing process for Al/CuO nanothermites; its relatively low cost and easy application to the fabrication of large-area films make it possible to envision the transfer into industrial products. This specific Al/CuO system is widely used for in micro initiation or exploding foil initiators [8][9][10][11] because of its high volumetric energy density (> 13 kJ/cm 3 ) and its propensity to produce hot gas.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, DC magnetron-sputtering has developed rapidly over the last decade to become a standard manufacturing process for Al/CuO nanothermites; its relatively low cost and easy application to the fabrication of large-area films make it possible to envision the transfer into industrial products. This specific Al/CuO system is widely used for in micro initiation or exploding foil initiators [8][9][10][11] because of its high volumetric energy density (> 13 kJ/cm 3 ) and its propensity to produce hot gas.…”
Section: Introductionmentioning
confidence: 99%
“…Rapidly, thermite multilayers [9][10][11][12][13], composed of alterning metal and metal-oxide reactants, have emerged as interesting fully dense energetic thin film. They are capable to promptly release high amount of heat with emission of light, thus opening opportunities for tunable on-chip ignition [14,15] and actuation [16]. Themite multilayers feature self-sustained propagating reaction after being ignited locally by an external source of heat.…”
Section: Introductionmentioning
confidence: 99%
“…The SCB bridge has two V-type angles (90°) and the size is 380 μm (width) × 80 μm (length) × 2.5 μm (thickness). The SCB-Al/MoO3 chip was fabricated on a silicon wafer using a combination of photolithography, sputtering deposition, and lift-off techniques [19,20].…”
Section: Design and Preparation Of Scb-al/moo3mentioning
confidence: 99%