2000
DOI: 10.1143/jjap.39.l284
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Characteristics of Interface-Modified Josephson Junctions Fabricated under Various Etching Conditions

Abstract: We have studied the influence of process parameters on electrical properties for interface-modified junctions (IMJs) based on YBa2Cu3Ox. Tunnel barriers are produced by an electron cyclotron resonance (ECR) plasma etching process and subsequent vacuum annealing. We have found that time and accelerating voltage (V acc) in the etching sequence, in which the ramp-edge geometry is defined, are very important parameters for the barrier formation. Increasing the etching time and acc… Show more

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Cited by 19 publications
(4 citation statements)
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“…The spreads in of 8% was achieved for a 100-junction series-array on a ground plane at 4.2 K [18]. Fig.…”
Section: Junction Characteristicsmentioning
confidence: 86%
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“…The spreads in of 8% was achieved for a 100-junction series-array on a ground plane at 4.2 K [18]. Fig.…”
Section: Junction Characteristicsmentioning
confidence: 86%
“…Since the initial proposal of the interface-modified ramp-edge junction by Moeckly and Char [15], it has been improved in many laboratories [16]- [18]. The spreads in of 8% was achieved for a 100-junction series-array on a ground plane at 4.2 K [18].…”
Section: Junction Characteristicsmentioning
confidence: 99%
“…Interfaceengineered Josephson junctions (IEJs) have been developed by several institutes [1][2][3][4]. We have already studied the relationship between junction characteristics and process parameters such as etching conditions, and confirmed that junction characteristics are controlled by accelerating the voltage and the etching time during the etching sequence [5,6]. The IEJs have uniformly thin barriers [7,8].…”
Section: Introductionmentioning
confidence: 85%
“…The main idea is that the YBCO surface can be modified into a non-superconducting material after being exposed to appropriate ion damage. Since this study, there has been a great deal of research on interfacemodified ramp-edge-type HTSC JJ using various methods for interface modification, such as plasma treatment [1][2][3], ion beam damage [4][5][6][7], chemical treatment [7] and base electrode doping [9]. Wen et al argued that the barrier layer, composed of Ba-based cubic perovskite phase, is certainly a derivative compound of YBCO [10].…”
Section: Introductionmentioning
confidence: 99%