In scanning-sample type Atomic Force Microscope, XY nanostage is needed for scanning. Performance of AFM is determined by the XY nanostage. In this paper, two types of xy nanostage are introduced: VCM and PZT type nanostage. We discussed characteristics, problems and solutions of VCM/PZT nanostage. The performance of the solution is evaluated by AFM imaging. VCM nanostage has good linearity, wide working range with vibration problem. PZT nanostage has high bandwidth, good vibration performance with small work…
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