Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media

Kučera, Martin; Wistrela, E.; Pfusterschmied, Georg; Ruiz-Díez, Víctor; Sánchez‐Rojas, J. L.; Schalko, J.; Bittner, A.; Schmid, U.

doi:10.1063/1.4928429

Cited by 28 publications

(19 citation statements)

References 20 publications

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“…For an efficient excitation of higher order vibration modes, an appropriate electrode layout is required so that the target mode is optimally excited and sensed. In particular, roof tile-shaped modes are optimally actuated using a stripped electrode design [ 12 , 21 ], which allows a two-port scheme. In order to prevent excessive damping associated with the substrate, the anchoring of the plates to the substrate frame was carefully designed to reduce the energy dissipation.…”

Section: Materials and Setupmentioning

confidence: 99%

Piezoelectric MEMS Resonators for Cigarette Particle Detection

et al. 2019

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In this work, we demonstrate the potential of a piezoelectric resonator for developing a low-cost sensor system to detect microscopic particles in real-time, which can be present in a wide variety of environments and workplaces. The sensor working principle is based on the resonance frequency shift caused by particles collected on the resonator surface. To test the sensor sensitivity obtained from mass-loading effects, an Aluminum Nitride-based piezoelectric resonator was exposed to cigarette particles in a sealed chamber. In order to determine the resonance parameters of interest, an interface circuit was implemented and included within both open-loop and closed-loop schemes for comparison. The system was capable of tracking the resonance frequency with a mass sensitivity of 8.8 Hz/ng. Although the tests shown here were proven by collecting particles from a cigarette, the results obtained in this application may have interest and can be extended towards other applications, such as monitoring of nanoparticles in a workplace environment.

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Section: Materials and Setupmentioning

confidence: 99%

Piezoelectric MEMS Resonators for Cigarette Particle Detection

et al. 2019

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“…However, especially the roof-tile shaped modes have recently demonstrated their suitability for liquid media applications, due to high quality factors and reasonably low resonant frequencies [11,12]. Preliminary studies involved the characterization in isopropanol of the first order of this mode [11], with a Q-factor value around 35, and of higher orders [13], with Q-factors above 200. The optimization of these modes and their application as viscosity and density sensors has recently been object of different studies [6,14,15], exhibiting density resolutions as low as 1.5×10−7 g/mL and viscosity resolutions as low as 1.3×10−4 mPa·s.…”

Section: Introductionmentioning

confidence: 99%

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Ruiz-Díez

Toledo

Hernando-García

et al. 2019

Sensors

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Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

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“…Hexadecimal numbering is used for the Leissa nomenclature. The insets show the corresponding mode shape and the dashed line represents viscous damping deduced from theoretical considerations where the cantilever is heft 3.2020 approximated by a sphere to enable an analytically solution of the Navier-Stokes equations [19]. The corresponding results for the resonance frequency f res , Q and G are given in Table 1.…”

Section: Resultsmentioning

confidence: 99%

High performance piezoelectric AlN MEMS resonators for precise sensing in liquids

Schneider

Pfusterschmied

Patocka

et al. 2020

Elektrotech. Inftech.

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Piezoelectric silicon micro-machined resonators triggered in the two-dimensional roof-tile shaped mode exhibit exceptionally high quality factors even in highly viscous liquids. In combination with an all-electric readout, this enables precise measurements in liquid media with high output signals, if the electrode design and the anchor geometry are tailored to match the selected order of the rooftile shaped mode. This paper provides an overview of this promising class of resonator modes for micro-electromechanical systems (MEMS) and highlights three application scenarios. In the food industry, the MEMS sensor can be used to monitor the fermentation process in wine by tracking the density and hence, the concentration of ethanol. In technical lubricants, the concentration of ferrous particles can be monitored by integrating a magnetic actuator on the resonator. Finally, even in highly viscous bitumen, the MEMS sensor is successfully used to measure the viscosity of this material. Piezoelektrische AlN-basierte MEMS-Resonatoren für hochgenaue Messungen in Flüssigkeiten.Piezoelektrische, durch Mikrofabrikation hergestellte Siliziumresonatoren, die in 2D-"Wellblech"-Schwingungsmoden angeregt werden, weisen selbst in hochviskosen Flüssigkeiten außergewöhnlich hohe Qualitätsfaktoren auf. In Kombination mit einer vollständig elektrischen Anregung und Auslesung ermöglicht dies präzise Messungen in flüssigen Medien mit hohen Ausgangssignalen, wenn das Elektrodendesign und die Ankergeometrie auf die ausgewählte Ordnung der "Wellblech"-Mode abgestimmt sind. Dieser Artikel bietet einen Überblick über diese vielversprechende Klasse von Resonatormoden für mikroelektromechanische Systeme (MEMS) und zeigt drei Anwendungsszenarien auf. In der Lebensmittelindustrie kann der MEMS-Sensor verwendet werden, um den Fermentationsprozess in Wein durch Verfolgung der Dichte und damit der Ethanolkonzentration zu überwachen. In technischen Schmierstoffen kann die Konzentration von Eisenpartikeln durch Integration eines magnetischen Aktuators auf dem Resonator überwacht werden. Abschließend kann der MEMS-Sensor auch in hochviskosem Bitumen erfolgreich zur Messung der Viskosität dieses Materials eingesetzt werden.

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Characterisation of multi roof tile-shaped out-of-plane vibrational modes in aluminium-nitride-actuated self-sensing micro-resonators in liquid media

Cited by 28 publications

References 20 publications

Piezoelectric MEMS Resonators for Cigarette Particle Detection

Piezoelectric MEMS Resonators for Cigarette Particle Detection

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

High performance piezoelectric AlN MEMS resonators for precise sensing in liquids

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