Channel flow network at low electric field with high flow resistance compensation pattern

Jeong, Youchul; Han, Y. S.; Kim, Songyi; Lee, Haehyung; Chang, Jun Keun; Cho, Dong‐il Dan; Chung, Doo Soo; Chun, Kukjin

doi:10.1109/memsys.2003.1189778

The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE

DOI: 10.1109/memsys.2003.1189778

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Channel flow network at low electric field with high flow resistance compensation pattern

Youchul Jeong

Y. S. Han²,

Songyi Kim³

et al.

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Channel flow network at low electric field with high flow resistance compensation pattern

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