2021
DOI: 10.1002/asia.202100199
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Can a Procedure for the Growth of Single‐layer Graphene on Copper be used in Different Chemical Vapor Deposition Reactors?

Abstract: In the last decade, catalytic chemical vapor deposition (CVD) has been intensively explored for the growth of single-layer graphene (SLG). Despite the scattering of guidelines and procedures, variables such as the surface texture/chemistry of catalyst metal foils, carbon feedstock, and growth process parameters have been well-scrutinized. Still, questions remain on how best to standardize the growth procedure. The possible correlation of procedures between different CVD setups is an example. Here, two thermal … Show more

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Cited by 5 publications
(2 citation statements)
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References 61 publications
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“…The Au electrodes deposited overlapped the sides of the FS-NGF by ∼0.2 cm (on each side). Unlike commercially available macroscale graphite heaters (e.g., the graphite heaters used in our Aixtron BMPro4” CVD system), the stack of NGF/Kapton could be bent repeatedly without compromising the NGF structural integrity (Figure c). Additionally, these films have a considerably lower sheet resistance (10–50 Ω/sq.…”
Section: Resultsmentioning
confidence: 99%
“…The Au electrodes deposited overlapped the sides of the FS-NGF by ∼0.2 cm (on each side). Unlike commercially available macroscale graphite heaters (e.g., the graphite heaters used in our Aixtron BMPro4” CVD system), the stack of NGF/Kapton could be bent repeatedly without compromising the NGF structural integrity (Figure c). Additionally, these films have a considerably lower sheet resistance (10–50 Ω/sq.…”
Section: Resultsmentioning
confidence: 99%
“…The monolayer graphene, grown by CVD on Cu foil, was then transferred on the sample with Ti/Au electrodes. (Figure 2d) [16][17][18]. In the next step, an e-beam resist PMMA 950K A4 was spin-coated and patterned by EBL, precisely in the gap between the metal pads (Figure 2e).…”
Section: Fabricationmentioning
confidence: 99%