2023
DOI: 10.3390/photonics10050597
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Calcination-Enhanced Laser-Induced Damage Threshold of 3D Micro-Optics Made with Laser Multi-Photon Lithography

Abstract: Laser Direct Writing (LDW), also known as 3D multi-photon laser lithography of resins, is a promising technique for fabricating complex free-form elements, including micro-optical functional components. Regular organic or hybrid (organic–inorganic) resins are often used, with the latter exhibiting better optical characteristics, as well as having the option to be heat-treated into inorganic glass-like structures particularly useful for resilient micro-optics. This work is a continuation of our SZ2080™ calcinat… Show more

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Cited by 6 publications
(2 citation statements)
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References 46 publications
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“…Photonic crystal (PhC) lasers now deliver tens of Watts output powers at near-IR wavelengths from sub-1 mm apertures at very low divergence angle [20]. Micro-optics based on a high damage threshold SZ2080™photo-resist is a promising solution [21,22].…”
Section: Discussionmentioning
confidence: 99%
“…Photonic crystal (PhC) lasers now deliver tens of Watts output powers at near-IR wavelengths from sub-1 mm apertures at very low divergence angle [20]. Micro-optics based on a high damage threshold SZ2080™photo-resist is a promising solution [21,22].…”
Section: Discussionmentioning
confidence: 99%
“…For SZ2080™, this approach is based on the spontaneous thermal This study aims to demonstrate the possibility of depositing AR coatings on microlenses with sizes less than 100 µm (Figure 1b) using ALD. The feasibility of the method is tested using a hybrid organic-inorganic polymer SZ2080™, which is compatible with the heat treatment post-processing [20], offering high optical damage resilience [21].…”
Section: Preparation Of Spin-coated Samplesmentioning
confidence: 99%