2013 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) 2013
DOI: 10.1109/vlsi-tsa.2013.6545626
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Bit Cost Scalable (BiCS) technology for future ultra high density memories

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Cited by 18 publications
(12 citation statements)
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“…The vertical poly-Si TFT is used as a memory transistor in the 3D NAND Flash memory, BICS, as shown in Fig. 23 [52]. The BICS is expected as a next generation high-density NAND Flash memory.…”
Section: D-stacked Cmos Image Sensormentioning
confidence: 99%
“…The vertical poly-Si TFT is used as a memory transistor in the 3D NAND Flash memory, BICS, as shown in Fig. 23 [52]. The BICS is expected as a next generation high-density NAND Flash memory.…”
Section: D-stacked Cmos Image Sensormentioning
confidence: 99%
“…One variant of this concept has reached the market recently [71] and more devices are expected in the near future. Besides NAND Flash, the general concept can also be extended to other devices like resistive RAM (RRAM) [72]. Although not all applications can benefit from the nanowire geometry in the same way the charge trapping memory cell does, in most cases a nanowire like structure will be the result of this type of integration scheme.…”
Section: Electron Devices Based On Silicon Nanowiresmentioning
confidence: 99%
“…To enlarge the capacity, 3D-NAND flash memory is developed by stacking word-line (WL) layers (Fig. 1) [1].…”
Section: Introductionmentioning
confidence: 99%