2009 IEEE International Memory Workshop 2009
DOI: 10.1109/imw.2009.5090581
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BiCS Flash as a Future 3D Non-Volatile Memory Technology for Ultra High Density Storage Devices

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Cited by 34 publications
(14 citation statements)
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“…Multiple holes are drilled through the stacks and filled with poly-silicon in order to form a series of vertically-arranged NAND Flash memory cells. Bitline Selectors (BLS) and Bitlines (BL) contacts are on top of the structure [21]. Each cell in the BiCS architecture works in depletion-mode [22] since the poly-silicon constituting the body of the transistor is lightly n-doped with a uniform profile or even left un-doped.…”
Section: Bics Architecturementioning
confidence: 99%
“…Multiple holes are drilled through the stacks and filled with poly-silicon in order to form a series of vertically-arranged NAND Flash memory cells. Bitline Selectors (BLS) and Bitlines (BL) contacts are on top of the structure [21]. Each cell in the BiCS architecture works in depletion-mode [22] since the poly-silicon constituting the body of the transistor is lightly n-doped with a uniform profile or even left un-doped.…”
Section: Bics Architecturementioning
confidence: 99%
“…PBICS architecture [14] is a derivation of bit-cost scalable (BiCS) [15,16]; both are based on a vertical channel GAA device. The PBICS structure is composed of two pillars that are shorted at the bottom side by a pipe connection ( Figure 6).…”
Section: Pipe-shaped Bit Cost Scalable (Pbics) Architecturementioning
confidence: 99%
“…Holes are punched through the entire stack and plugged with poly-silicon, thus forming a series of vertical memory cells connected in a NAND architecture. At the top of the structure we have Bit Line Selectors (BLS's) and Bitlines (BLs) [9].…”
Section: Bicsmentioning
confidence: 99%
“…4.8 and 4.9 the basic building block of BiCS memory is split in different sections in order to provide a greater level of details for the different elements [6,9]. Cell's structure is clearly visible in the Middle section where the reader can find all the layers seen in Fig.…”
Section: Bicsmentioning
confidence: 99%