Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization

Dehaerne, Enrique; Dey, Bappaditya; Halder, Sandip; De Gendt, Stefan

doi:10.1109/elmar59410.2023.10253916

2023 International Symposium ELMAR 2023

DOI: 10.1109/elmar59410.2023.10253916

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Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization

Enrique Dehaerne,

Bappaditya Dey,

Sandip Halder

et al.

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Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization

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References 21 publications

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