2022
DOI: 10.1007/s11433-022-1907-9
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Band alignment and polarization engineering in κ-Ga2O3/GaN ferroelectric heterojunction

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Cited by 9 publications
(5 citation statements)
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“…There are no observable peaks related to other κ-Ga 2 O 3 orientations and different Ga 2 O 3 polymorphs, which suggests that the hetero-epitaxy of pure-phase κ-Ga 2 O 3 is achieved, and the out-of-plane epitaxial relationship is (001) κ-Ga 2 O 3 || (0001) Al 2 O 3 [12]. In terms of the first-principles calculations, the lattice expansion and the formation energy of Ga 2 O 3 polymorphs are in the tendency of β < κ < α [3,13]. Therefore, κ-Ga 2 O 3 phase is stable at a proper temperature of 525 • C, mediated by the misfit-induced strain [14].…”
Section: Materials Epitaxy and Device Fabricationmentioning
confidence: 92%
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“…There are no observable peaks related to other κ-Ga 2 O 3 orientations and different Ga 2 O 3 polymorphs, which suggests that the hetero-epitaxy of pure-phase κ-Ga 2 O 3 is achieved, and the out-of-plane epitaxial relationship is (001) κ-Ga 2 O 3 || (0001) Al 2 O 3 [12]. In terms of the first-principles calculations, the lattice expansion and the formation energy of Ga 2 O 3 polymorphs are in the tendency of β < κ < α [3,13]. Therefore, κ-Ga 2 O 3 phase is stable at a proper temperature of 525 • C, mediated by the misfit-induced strain [14].…”
Section: Materials Epitaxy and Device Fabricationmentioning
confidence: 92%
“…The semi-stable κ-Ga 2 O 3 has unique merits that are absent in the most stable β-Ga 2 O 3 , including the favorable * Author to whom any correspondence should be addressed. heteroepitaxial characteristics, great compatibility with common substrates and the possibility of polarization engineering endowed by its ferroelectric polar nature [1][2][3]. Extensive research efforts have been made in κ-Ga 2 O 3 for offering the possibility to take semiconductor electronics and photonics into regimes that currently remain out of reach.…”
Section: Introductionmentioning
confidence: 99%
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“…Ga 2 O 3 possesses five polymorphs, specifically α, β, γ, δ, and ε. Among these, the ε-phase is noted for its remarkable polarization property, which is an order of magnitude greater than GaN, a semiconductor material typically employed in high electron mobility transistors (HEMTs). , The findings on polarization of ε-phase Ga 2 O 3 have piqued the interest of numerous researchers that are exploring the possibilities of ε-Ga 2 O 3 based devices. Chen et al have reported on the polarization switching properties of κ-Ga 2 O 3 (where κ and ε denote the same phase of Ga 2 O 3 ) in κ-Ga 2 O 3 /GaN heterostructure, revealing a remanent polarization of approximately 2.7 μC/cm 2 . Wang et al have indicated that the interface of ε-Ga 2 O 3 / m -GaN ( m -AlN) could achieve a high two-dimensional electron gas (2DEG) density of 10 14 cm –2 .…”
Section: Introductionmentioning
confidence: 99%
“…14−16 Chen et al have reported on the polarization switching properties of κ-Ga 2 O 3 (where κ and ε denote the same phase of Ga 2 O 3 ) in κ-Ga 2 O 3 /GaN heterostructure, revealing a remanent polarization of approximately 2.7 μC/cm 2 . 17 Wang et al have indicated that the interface of ε-Ga 2 O 3 /m-GaN (m-AlN) could achieve a high two-dimensional electron gas (2DEG) density of 10 14 cm −2 . 18 Simultaneously, Kuang et al recorded a 2DEG sheet carrier density of 1.2 × 10 14 cm −2 and enhanced mobility of 192 cm 2 / (V s) within an ε-Ga 2 O 3 /In 2 O 3 heterostructure.…”
Section: ■ Introductionmentioning
confidence: 99%