2014
DOI: 10.1016/j.nima.2013.12.054
|View full text |Cite
|
Sign up to set email alerts
|

Automated system for efficient microwave power coupling in an S-band ECR ion source driven under different operating conditions

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1

Citation Types

0
3
0

Year Published

2015
2015
2023
2023

Publication Types

Select...
5

Relationship

1
4

Authors

Journals

citations
Cited by 6 publications
(3 citation statements)
references
References 16 publications
0
3
0
Order By: Relevance
“…When the microwave power is applied to the plasma chamber in presence of a magnetic field, the gas ionization and plasma formation processes take place [17]. Once the plasma is formed, impedance matching between the plasma impedance (load impedance) and the microwave generator impedance (source impedance) is necessary for maximum power transfer [18,19]. The plasma impedance is a complex time-varying parameter whereas the source impedance is static.…”
Section: Pulsed Beam Extraction From Cw Plasmamentioning
confidence: 99%
“…When the microwave power is applied to the plasma chamber in presence of a magnetic field, the gas ionization and plasma formation processes take place [17]. Once the plasma is formed, impedance matching between the plasma impedance (load impedance) and the microwave generator impedance (source impedance) is necessary for maximum power transfer [18,19]. The plasma impedance is a complex time-varying parameter whereas the source impedance is static.…”
Section: Pulsed Beam Extraction From Cw Plasmamentioning
confidence: 99%
“…To inject the RF microwaves properly into the plasma chamber, a RF chain, consisting of a RF generator, a Klystron, an Automatic Tuner Unit (ATU, [17]) and several waveguide components, are employed. The RF generator provides a microwave signal, which is amplified by the Klystron up to a maximum of .…”
Section: B Rf Systemmentioning
confidence: 99%
“…The ATU is also a challenging device to control. It implements an autotuning system based on a look up table with feedback in order to automatically adjust the impedance matching [17].…”
Section: A Control Networkmentioning
confidence: 99%