2002
DOI: 10.1063/1.1427030
|View full text |Cite
|
Sign up to set email alerts
|

Argon ionization cross sections for charge state distribution modeling in electron cyclotron resonance ion source

Abstract: An updated and more accurate database for single- and double-ionization cross sections for almost all argon ions has been developed for the modeling of the charge state distribution (CSD) within an electron cyclotron resonance ion source. When the highly non-Maxwellian anisotropic electron-distribution function, is modeled by a Fokker–Planck code, one has to use the ionization cross sections instead of the Maxwellian rate coefficients. Most of the fitting coefficients used within the well-established semi-empi… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
5
0

Year Published

2006
2006
2017
2017

Publication Types

Select...
4

Relationship

2
2

Authors

Journals

citations
Cited by 4 publications
(6 citation statements)
references
References 21 publications
1
5
0
Order By: Relevance
“…Comparing Figs. 22 and 21, we see that a ratio between currents in the high and low modes is well reproduced in the simulations. When tuning the source for production of moderately charged ions such as Ar 8+ , most efforts typically is put to increase the gas flow into the chamber without slipping into the low mode; when source is in the low mode, it is necessary to decrease the gas flow substantially to restore the source good performance.…”
Section: Dependencies On the Gas Flow And On The Coupled Microwave Powersupporting
confidence: 54%
See 1 more Smart Citation
“…Comparing Figs. 22 and 21, we see that a ratio between currents in the high and low modes is well reproduced in the simulations. When tuning the source for production of moderately charged ions such as Ar 8+ , most efforts typically is put to increase the gas flow into the chamber without slipping into the low mode; when source is in the low mode, it is necessary to decrease the gas flow substantially to restore the source good performance.…”
Section: Dependencies On the Gas Flow And On The Coupled Microwave Powersupporting
confidence: 54%
“…The single ionization rates are combined from datasets [20,21]. Double ionization rates are taken from the fit of [22] after correcting for some mistypes in their table of fitting coefficients. For the ionization rates with a number of removed electrons n>=3 we use the scaling from [23].…”
Section:      mentioning
confidence: 99%
“…Multiple ionization could enhance the simple ionization cross sections significantly to affect charge distribution. 11 The numerical results presented here are far from complete. Plasma sheath regions and beam extraction diodes have not been taken into account in the MCBC code and the background plasma modeling GEM code.…”
Section: Discussionmentioning
confidence: 92%
“…10 Direct ionization, autoionization, and double ionization of Ar for all charge states are used in our simulation.…”
Section: Beam Capture Dynamics Modeling By Mcbcmentioning
confidence: 99%
“…The FokkerPlanck equation is solved to obtain the non-Maxwellian electron energy distribution function. 5,9,10 As electron temperature is not well defined, we use average electron energy density:…”
Section: Ecris Plasma Model and Parameter Study Using Gemmentioning
confidence: 99%