2010
DOI: 10.1007/978-3-642-11598-1_19
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Abstract: Most assembly processes on the nano-scale take place in a Scanning Electron Microscope (SEM) for the reason of high magnification range of the microscope itself. Like all microscopes, the SEM delivers visual data just in two dimensions. This is a bottleneck for all assembly processes which require of course information of the parts to join in a third dimension. This paper shows an approach with a dedicated sensor. As an example for an assembly process a carbon nano tube (CNT) is fixed on a sharp metal tip. The… Show more

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Cited by 4 publications
(2 citation statements)
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References 7 publications
(4 reference statements)
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“…So, it is worthwhile to acquire the depth information for robotic manipulators. To date, the depth information has been extensively studied (Fatikow et al , 2008b; Jähnisch and Fatikow, 2007; Wich et al , 2010) and finally addressed by force sensor and visual feedback itself.…”
Section: Different Control Algorithms For High-precision Manipulationmentioning
confidence: 99%
“…So, it is worthwhile to acquire the depth information for robotic manipulators. To date, the depth information has been extensively studied (Fatikow et al , 2008b; Jähnisch and Fatikow, 2007; Wich et al , 2010) and finally addressed by force sensor and visual feedback itself.…”
Section: Different Control Algorithms For High-precision Manipulationmentioning
confidence: 99%
“…Height control in nanomanipulation is challenging owing to the lack of depth information [66][67][68] . Depth sensing can be achieved using a force sensor to touch a target 69 .…”
Section: Sensingmentioning
confidence: 99%