Applications of a broadband electron-beam pumped XUV radiation source

Abstract

A simple table-top windowless system for extreme ultraviolet (XUV) spectroscopy which avoids differential pumping for both the radiation source and the detector is presented. The radiation source uses excimer emission from rare gases excited with low energy (13 keV) electron beam. Broadband emission in the entire wavelength range from 60 to 140 nm is demonstrated using He, Ne and a Ne-Ar gas mixture. It was observed that the so-called third continuum is absent in Ne when low energy electron-beam excitation is used in contrast to earlier results using high energy ion beam excitation. An application of the set-up for a LiF transmission measurement close to the cut-off wavelength (105 nm) is demonstrated. It is shown how the radiation source could be applied in a simple and efficient technique of material treatment with XUV/VUV radiation.

Ion-beam excitation of liquid argon

“…These two components consequently have (nearly) the same wavelength. The loss of spectral information of the scintillation light in the measurement, however, might influence this intensity ratio: for example, for the case of neon in the gas phase it has been shown that the third excimer continuum 3 only appears for the excitation with heavy ions, but not for the excitation with electrons [11]. As light emission in this continuum is also very fast, see Sect.…”

Electron-beam-sustained discharge revisited — light emission from combined electron beam and microwave excited argon at atmospheric pressure

“…[9] and [5] in the context of vacuum ultraviolet light sources. (1) is sent into the target chamber (2) through a very thin (300nm) SiN/SiO2 membrane (3). The microwave electrode (4) is mounted on the opposite side.…”

“…However, this paper focuses on measurements performed at atmospheric pressure. Operating the electron beam sustained discharge in a continuous mode offers enough time to record high quality optical emission spectra of the plasma with a scanning monochromator over a very broad spectral range from about 60nm [3] up to 1000nm.…”

Energy-transfer processes in neon-hydrogen mixtures excited by electron beams

“…Rate constant Reference and comments k 1 4.4ϫ 10 −32 6 mass spectroscopy k 2 3.3ϫ 10 −8 T e −0.43 → 1.6ϫ 10 −7 7 used in kinetic model 3.7ϫ 10 −8 ͑0.027/ T g ͒T e −0.43 → 1.7ϫ 10 −7 3 used in kinetic model k 3 1.3ϫ 10 −10 8 selected ion flow 1 ϫ 10 −10 7 used in kinetic model k 4 4.1ϫ 10 −34 9 laser absorption 5 ϫ 10 − 34 10 used in kinetic model 1.6ϫ 10 − 34 3 used in kinetic model k 5 5.5ϫ 10 −11 11 crossed beams k 5 + k 6 6 ϫ 10 −11 3 used in kinetic model k 6 1.5ϫ 10 −11 3 calculated using kinetic model k 7k 8k 9k 10 1 ϫ 10 −10 ͑ =2͒ 12 quantum mechanical 4.5ϫ 10 −15 ͑ =1͒ 12 2.5ϫ 10 −20 ͑ =0͒ 12 k 11 2.08ϫ 10 −9 13 ion cyclotron ͑2.1− 2.5͒ ϫ 10 −9 13 polarization theory k 12 0.9ϫ 10 −9 14 mass spectroscopy k 13 1 ϫ 10 −8 15 merged beams 2 ϫ 10 −7 ͑all ͒ 16 merged beams…”

“…Combining experimental techniques of time-resolved spectroscopy using pulsed electron-beam excitation 4 and extreme ultraviolet ͑EUV͒ spectroscopy, 5 we were able to study the time dependence of light emission following short pulse ͑5 ns͒ lowenergy electron-beam excitation. Combining experimental techniques of time-resolved spectroscopy using pulsed electron-beam excitation 4 and extreme ultraviolet ͑EUV͒ spectroscopy, 5 we were able to study the time dependence of light emission following short pulse ͑5 ns͒ lowenergy electron-beam excitation.…”