“…With the development of micromechanics and micro-optoelectro-mechanical systems (MOEMS), the requirements of microactuating technology and microactuators have been increased. Most of the previous microactuators utilize conventional driving principles such as magnetic [1], electrostatic [2], piezoelectric [3,4], magnetostrictive [5], and thermal actuation [6,7], among which, thermal actuation includes electrothermal actuation [8][9][10] and optothermal actuation [11,12]. In an electrothermal actuator, thermal deformation occurs when electric current flows through two expansion arms of differing resistance [13,14], so that electrothermal actuation is achieved.…”