2010
DOI: 10.1017/s1431927610059064
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Angular Backscatter Filtering with an Immersion Lens SEM

Abstract: Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

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“…For this reason, microscope manufacturers have developed different ways to improve collection and filtering of BSE. Consequently, very low voltage can be used to image thin layers and very small details with a resolution reaching the nanometer scale (Ushiki et al, 1998; Richards et al, 1999; Steigerwald et al, 2004; Morandi et al, 2006; Kikuchi et al, 2007; Erdman et al, 2009; Lich et al, 2010). These new possibilities allow taking advantage of the complicated BSE imaging contrast at very low voltage.…”
Section: Introductionmentioning
confidence: 99%
“…For this reason, microscope manufacturers have developed different ways to improve collection and filtering of BSE. Consequently, very low voltage can be used to image thin layers and very small details with a resolution reaching the nanometer scale (Ushiki et al, 1998; Richards et al, 1999; Steigerwald et al, 2004; Morandi et al, 2006; Kikuchi et al, 2007; Erdman et al, 2009; Lich et al, 2010). These new possibilities allow taking advantage of the complicated BSE imaging contrast at very low voltage.…”
Section: Introductionmentioning
confidence: 99%