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Abstract: Articles you may be interested inNanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding Laser generated ultrasound in metals and thin films on silicon AIP Conf.

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Cited by 8 publications
(6 citation statements)
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References 28 publications
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“…218 Here, the capabilities of the technique as a surface analysis tool are challenged, and therefore the concept of sample homogeneity becomes essential. The ultimate capability of the technique in terms of minimal spatial (lateral and depth) resolution is still unknown, and near-field scanning microscopy approaches 452,,–458 are currently actively investigated.…”
Section: Review Outlinementioning
confidence: 99%
See 1 more Smart Citation
“…218 Here, the capabilities of the technique as a surface analysis tool are challenged, and therefore the concept of sample homogeneity becomes essential. The ultimate capability of the technique in terms of minimal spatial (lateral and depth) resolution is still unknown, and near-field scanning microscopy approaches 452,,–458 are currently actively investigated.…”
Section: Review Outlinementioning
confidence: 99%
“…Systematic studies will be needed to understand not only the size and shape of the nanopatterns formed on the target in near-field experiments, 458 but also to identify the instrumental parameters in the optical collection system that should be optimized in the future in order to be able to observe an emission spectrum.…”
Section: Micro-libs (Libs Microprobe)mentioning
confidence: 99%
“…Advances in the ultrafast laser technology and development of a better understanding of laser-material interaction have led to several interesting innovations in micromanufacturing and nanomanufacturing beyond the diffraction limit (7,99,(163)(164)(165)(166)(167)(168)(169)(170). Over the past decade, lasers have been exploited in micromachining of miniaturized components involved in various applications, such as microelectromechanical systems (MEMS), microelectronics, telecommunication, optoelectronics, and biomedical devices.…”
Section: Laser Micromachining and Nanomachiningmentioning
confidence: 99%
“…Chimmalgi, Grigoropoulos, and Komvopoulos wrote features with dimensions as small as 10–12 nm in thin metallic films using a femtosecond 800 nm laser and an apertureless NSOM system (Figure 3a). 24 Localized heating can produce either trenches or mounds, 24,38,39 and can induce recrystallization of amorphous or polycrystalline materials, a technologically important process in the fabrication of nanoscale transistors. 34,40 At higher laser pulse energies, ablation occurs, and spot sizes as small as 100 nm have been fabricated using 300 nm-diameter apertured tips and 400 nm femtosecond illumination.…”
Section: Materials Modification and Fabrication Mechanismsmentioning
confidence: 99%