Analysis of Linearity and Frequency Response of a Novel Piezoelectric Flextensional Actuator Using a Homodyne Interferometer and the $J_{1}{-}J_{4}$ Method

A simplified and higher dynamic range version of the J1…J4 method for optical phase measurements

“…The authors have regularly used the J 1 … J 4 method applied to nanodisplacement measurements in piezoelectric flextensional actuators (PFAs) [17]. However, a peculiar feature of the system presented in Figure 4 is that a Pockels cell has an analytical and well‐behaved solution, which can be easily deduced by using electromagnetic theory.…”

Digital Demodulation of Interferometric Signals

“…Jin et al (Jin et al, 1991;Jin et al, 1992) modified this method to extend the desired phase modulation index. Marcal et al (Marcal et al, 2007) have used this digital demodulation technique with a Michelson interferometric configuration to characterize the frequency response of a novel piezoelectric actuator. We have used a similar digital demodulation algorithm to characterize microelectromechanical system (MEMS) structures .…”

A simple interferometric method to measure the calibration factor and displacement amplification in piezoelectric flextensional actuators

“…Recently, novel models of optimized PFAs have been designed using the topology optimization technique, a computational design method that combines FEM and an optimization algorithm (Silva and Kikuchi, 2000;Silva et al, 2003). A schematic of a such PFA is shown in figure 1: the caps convert and amplify the small radial displacement and vibration velocity of the piezoceramic into a much larger axial displacement and vibration velocity normal to the surface of the caps (Marçal et al, 2007).…”

“…In this work, a prototype based on these novel flextensional piezoactuators was manufactured and analyzed. This PFA was designed with the aim to be employed, in a future work, as a mechanical controller in the reference arm of a highsensitive optical interferometer proposed to measure time- (Marçal et al, 2007).…”

“…On the other hand, the technique named J 1 ..J 4 method provides direct, self-consistent, and linear phase readout without using any feedback or phase-bias (Sudarshanam and Srinivasan, 1989). Recently, this method has been applied to nanometric displacement measurements in PFAs by using a Michelson interferometer (Marçal et al, 2007). This technique employs well-known Bessel functions recurrence relations to determine the optical phase modulation index, and the phase measurement is unaffected by fading.…”