An improved interface and noise analysis of a turning fork microgyroscope structure

Cao, Huiliang; Li, Hongsheng; Liu, Jun; Shi, Yunbo; Tang, Jun; Shen, Chong

doi:10.1016/j.ymssp.2015.08.002

Cited by 62 publications

(46 citation statements)

References 17 publications

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“…Therefore, the equivalent mass contributed by the air flow through the jet shaping nozzle is given by (17) From Eqs. (11) and 15- (17), the total equivalent mass of the device including the masses of the diaphragm, air flows through the four nozzles, driving channels, and jet nozzles is determined by (18) The use of Eq. (9) for the equivalent spring stiffness K and Eq.…”

Section: Letmentioning

confidence: 99%

Fluidic mechanism for dual-axis gyroscope

Dau

Dinh

Tran

et al. 2018

Mechanical Systems and Signal Processing

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In this paper, we report a further study of flow-network generating four jet flows which circulate in a sealed device to experimentally investigate the feasibility and efficiency of a dual-axis gyroscope. The experiment is carried out successfully and the experimental results reasonably agreed with those obtained by numerical analysis using OpenFOAM. The flow rectifying coefficient is determined using the mathematical lump model for a vibrating system, which takes into account of the device geometry and resonant frequency. Experimental and numerical results demonstrate that the coefficient of the new system developed in this study is significantly higher than those of conventional designs. The hotwire-integrated device which can function as a dual-axis gyroscope is tested using a turntable with speeds up to 1900 rpm. The scale factor and cross-sensitivity of the system are 0.26 μVs/° and 1.2 %, respectively. The cross-sensitivity and the effects of linear acceleration, actuating voltage on the diaphragm, heating power and position of hotwires are also investigated.

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Section: Letmentioning

confidence: 99%

Fluidic mechanism for dual-axis gyroscope

Dau

Dinh

Tran

et al. 2018

Mechanical Systems and Signal Processing

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“…The proposed MSVRG has a ring radius (r) of 3000 µm, ring height (h) of 160 µm, capacitive gap (d 0 ) of 10 µm are substituted into the formula (9), and the amplitude of electrostatic force is calculated to be 1.5451µN.…”

Section: B Electrodes Settingmentioning

confidence: 99%

“…Recently, microelectromechanical systems (MEMS) technology has enabled the miniaturization and massproduction of gyroscopes which exhibit the characteristics of small volume, low power consumption, high reliability and easy integration. [1][2][3][4][5] Having been widely used in the fields of consumer electronics, vehicle navigation, aircraft control, missile precision guidance, etc., 1,[6][7][8][9] it is gaining increasing attention from researchers.…”

Section: Introductionmentioning

confidence: 99%

A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

et al. 2017

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This study presents a new MEMS vibrating ring gyroscope (VRG), which is driven by electrostatic force and detected by capacitance. A novel ring resonator with eight S-shaped symmetrical supporting springs is developed based on the advantageous characteristics of a thin-shell vibrating gyroscope. The capacitance electrodes, including the drive electrodes, the sense electrodes and the mode control electrodes, are designed according to the vibration characteristics of the ring resonator and the shape of the supporting springs. In addition, the operational principle of these electrode capacitors and the electrostatic force of the drive electrodes are discussed in detail. The gyroscope with high aspect-ratio structures is manufactured through an efficient fabrication process. Finally, the performance characteristics of the fabricated VRG are tested, and the experimentally obtained the zero-bias instability is about 0.0167°/s and angle random walk (ARW) is about 0.1363°/s1/2 at room temperature. Experimental results show that the VRG has a simple structure and relatively better performance characteristics for low and medium angular velocity measurements.

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“…In order to compensate for the drift temperature energy loss, Liu et al adopted a more complete design structure for MEMS vibratory gyroscopes [13]. Cao et al designed a very reasonable equivalent electrical model of silicon structure to deal with the difficulty of inaccurate performance caused by excessive temperature [14]. Fu et al adopted a special a great impact on the results.…”

Section: Introductionmentioning

confidence: 99%

A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

Cao

Shen

2020

Electronics

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To deal with the influence of temperature drift for a Micro-Electro-Mechanical System (MEMS) gyroscope, this paper proposes a new temperature error parallel processing method based on a novel fusion algorithm. Firstly, immune based particle swarm optimization (IPSO) is employed for optimal parameters search for Variational Modal Decomposition (VMD). Then, we can get the optimal decomposition parameters, wherein permutation entropy (PE) is employed as the fitness function of the particles. Then, the improved VMD is performed on the output signal of the gyro to obtain intrinsic mode functions (IMFs). After judging by sample entropy (SE), the IMFs are divided into three categories: noise term, mixed term and feature term, which are processed differently. Filter the mixed term and compensate the feature term at the same time. Finally, reconstruct them and get the result. Compared with other optimization algorithms, IPSO has a stronger global search ability and faster convergence speed. After Back propagation neural network (BP) is enhanced by Adaptive boosting (Adaboost), it becomes a strong learner and a better model, which can approach the real value with higher precision. The experimental result shows that the novel parallel method proposed in this paper can effectively solve the problem of temperature errors.Electronics 2020, 9, 499 2 of 21 circuit design structure to reduce the damping coefficient, which is convenient and economical [15]. Yang et al. adopted a new concept whereby the on-chip temperature compensation of the MEMS gyroscope is realized by the on-chip sensor. In order to make the on-chip temperature of the micro gyroscope well controlled, the newly integrated serpentine micro heater is used to achieve this function [16]. Cui et al. analyzed the working principle of the gyroscope and adopted the vibration compensation of the drive mode, which has a good effect [17]. However, the hardware compensation cost is high and it is too difficult to implement.The second is through software compensation, it includes the removal of noise and temperature compensation. The software compensation method mainly establishes a model for the drift part and the noise part of the MEMS gyroscope to remove noise and compensate drift. For the establishment of the temperature drift model, the reference temperature and the corresponding temperature drift output obtained in advance are used as a set of training set data. The model is established after the learning and training of the algorithm. When the temperature value is input, the model can predict the output value as compensation. There are two main methods. The first one is serial processing, which first uses a filter to perform noise reduction on the signal and then uses a model to eliminate drift. The other one is parallel processing, which refers to extracting and processing noise components and drift components separately. Dominik uses a combination of experiments and numerical values to provide accurate ceramic acceleration at higher temperature [18]. Yang uses a sim...

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An improved interface and noise analysis of a turning fork microgyroscope structure

Cited by 62 publications

References 17 publications

Fluidic mechanism for dual-axis gyroscope

Fluidic mechanism for dual-axis gyroscope

A novel MEMS S-springs vibrating ring gyroscope with atmosphere package

A Temperature Error Parallel Processing Model for MEMS Gyroscope based on a Novel Fusion Algorithm

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