An analysis on transmission microwave frequency spectrum of cut-off probe

Abstract

Charge resolved electrostatic diagnostic of colliding copper laser plasma plumes Phys. Plasmas 18, 103104 (2011) Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS) J. Appl. Phys. 110, 073303 (2011) A synchronized emissive probe for time-resolved plasma potential measurements of pulsed discharges Rev. Sci. Instrum. 82, 093505 (2011) Electrical time resolved metrology of dust particles growing in low pressure cold plasmas Phys. Plasmas 18, 093701 (2011) Additional information on Appl. Phys. Lett.

Computational characterization of cutoff probe system for the measurement of electron density

“…A novel method, usable under various conditions, which is known as the wave cutoff method using a transmittance of wave was developed by Kim et al [15][16][17] The cutoff probe, using the physical phenomenon of the plasma resonance created by the plasma inductance and capacitance, 18 is believed to be one of the most promising diagnostic tools due to its numerous advantages. For instance, the probe system is very simple and robust and the calculation of the electron density (n e ) from the measured cutoff frequency (…”

“…2 The theoretical error bar for the electron density measurement which originates from the choosing of the minimum value point as the cutoff point is known to be small. 18,19 The cutoff probe is more convenient than the hairpin probe for its use of lower frequency. 20 advantages, the cutoff probe is widely applied in measurements of the electron density in industrial plasma.…”

Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas

“…The magnitude and phase of the transmission spectrum provide informative peaks and slopes characterizing the plasma-sheath. When we see the phase of transmission spectrum (strictly speaking phase difference spectrum between current and voltage), the sign of the phase changes with frequency in series, plus, minus and plus [7,10]. This sign changes are originated from the fact that the property of the cutoff probe changes with frequency in series, capacitor, inductor, and capacitor as noted in the previous studies [7,9,10].…”

“…The FDTD simulation is known to be accurate solver of Maxwell's equations with realistic assumptions. It reproduces the experimentally obtained spectra of various microwave probes as well as the cutoff probe [7,[11][12][13][14][15][16]. The input parameters in the FDTD simulation are the material characteristic of the plasma density and collision frequency in the Drude model.…”

“…When we see the phase of transmission spectrum (strictly speaking phase difference spectrum between current and voltage), the sign of the phase changes with frequency in series, plus, minus and plus [7,10]. This sign changes are originated from the fact that the property of the cutoff probe changes with frequency in series, capacitor, inductor, and capacitor as noted in the previous studies [7,9,10]. Figure 2 shows the phase of transmission spectrum obtained from the FDTD simulation at the condition of n e = 2.5 × 10 10 cm −3 , p = 6.7 Pa, S = 0.33 mm, and T e = 2 eV (see black line).…”