In this paper the dynamics of MEMS devices is explored, which characterizes the behavior of a thermallyactuated MEMS in order to perform a system identification enabling controlled operation of the micro-device. By considering the input to the system is the current/voltage and the output is the amplified mechanical displacement, a transfer function, TF, is derived which includes energy losses due to the imperfect energy conversion from electric to thermal, and which correspond to various phenomena, such as convection, radiation and conduction -accounting for a Joule-effect temperature less than the ideal one. This TF also includes the relationship between temperature and the mechanical deformation of both "active and passive" flexure hinges, which are thermally-actuated and which contribute to the kinematics of the output motion of the micro-device. This TF model is validated by means of experimental data from an actual displacement-amplification MEMS which was fabricated by means of the PolyMUMPs surface machining technology.A exp = total actuator exposed area A s = actuator cross-sectional area c = actuator specific heat coefficient E in = energy input E out = energy output F uni = actuator unidirectional force Gr 2L = Grashoff number for full actuator length h = average convective heat transfer coefficient h r = linear radiation heat transfer coefficient I = current input k a = actuator thermal conductivity k med = medium's thermal conductivity L = ½ actuator length L Nu2 = Nusselt number for full actuator length P in = Power input in q & = volumetric power input R = actuator resistance R t = thermal contact resistance for conduction Re 2L = Reynolds number for full actuator length S = actuator conduction shape factor T = actuator temperature T med = medium's temperature Smart Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/15/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx T sub = substrate layer temperature T x=-L = surface temperature at base end of actuator (x = -L) T x=L = surface temperature at drive end of actuator (x = L) V = voltage input V ol = total volume of actuators α T = actuator coefficient for linear thermal expansion (CLTE) ε = actuator emissivity ε uni = actuator unidirectional strain ρ = actuator density σ = Stefan-Boltzmann constant σ T = actuator thermal stress