2010
DOI: 10.1021/am100283m
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Amorphous Metal/Oxide Nanolaminate

Abstract: Bilayers of sputtered amorphous multicomponent metal films (AMMFs) and solution deposited amorphous oxide films have been reproducibly deposited with varying thicknesses of 20, 25, and 30 nm to form ordered nanolaminates. Interdiffusion is observed at the AMMF-oxide boundary, leading to unique interface chemistries that are dictated by the nature and order of the deposition processes.

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Cited by 9 publications
(11 citation statements)
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“…The image reveals that the bilayer composition profile is faithfully repeated through the structure. The same high level of bilayer material repeatability is observed in ZrCuAlNi/AlPO laminates, as has been previously reported 14. Existing examples of dispersion engineering at optical frequencies via amorphous materials (glass lenses) have been successful, in part, because of the ease and reproducibility of amorphous material systems.…”
Section: Resultssupporting
confidence: 81%
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“…The image reveals that the bilayer composition profile is faithfully repeated through the structure. The same high level of bilayer material repeatability is observed in ZrCuAlNi/AlPO laminates, as has been previously reported 14. Existing examples of dispersion engineering at optical frequencies via amorphous materials (glass lenses) have been successful, in part, because of the ease and reproducibility of amorphous material systems.…”
Section: Resultssupporting
confidence: 81%
“…3, have been deposited via DC magnetron sputtering as ultra‐smooth, homogenous films with a minimum thickness of 2 nm. Oxidation of an amorphous metal film deposited via sputtering occurs at interfaces above and below the film 14. Below the film, the energy of sputter deposition supplies the driving force of oxidation, creating the sputter oxide shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…Nanoscale amorphous materials are important noncrystalline solids and are new type of advanced materials [18][19][20][21][22][23][24][25][26][27][28][29][30]. They have larger specific surface area than their bulk counterparts and therefore can show better performance and be applicable in more fields.…”
Section: Introductionmentioning
confidence: 99%
“…6 Recently, we have extended the study of AMTFs to a new platform for building metal−insulator−metal (MIM) devices 7 and nanolaminate structures with engineered dielectric response. 8,9 Additionally, the availability of high-quality interfaces in MIM devices using AMTF lower electrodes has enabled the development of a new method for characterization of energy barriers in tunneling diodes. 10 Our goal is to use the mechanical properties of amorphous metals, e.g., high elasticity and surface smoothness, to create highly reliable tunneling electronic devices and ultimately realize a new avenue for making flexible electronics.…”
Section: Introductionmentioning
confidence: 99%