Alumina MEMS Platform for Impulse Semiconductor and IR Optic Gas Sensors

Vasiliev, Alexey; Pavelko, R. G.; Gogish-Klushin, S. Yu.; Kharitonov, D. Yu.; Gogish-Klushina, O.S.; Соколов, А. В.; Samotaev, Nikolay

doi:10.1109/sensor.2007.4300563

Cited by 10 publications

(7 citation statements)

References 4 publications

(3 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The principle of sensing mostly depends on the sensing materials. For example, a formaldehyde gas sensor is developed based on the solid-state sensor of NiO thin film [74] , while other MEMS gas sensors can be based on the optical gas sensor [75] , acoustic gas sensor [76] , and electrochemical gas sensor [77] .…”

Section: Mems Gas Sensorsmentioning

confidence: 99%

High‐Temperature Gas Sensors for Harsh Environment Applications: A Review

Ghosh

Zhang

Hai-feng

2019

CLEAN Soil Air Water

View full text Add to dashboard Cite

This review paper introduces various types of gas sensors operating at high temperatures and their mechanisms, which can provide solutions to gas sensor selection for harsh environment application. Most of the gas sensors are found to be functioning at moderate operating temperatures (<400°C) and only a few reports are available, which highlight gas-sensing performance above 400°C. Therefore, the selection of a more reliable high-temperature gas sensor is necessary and advantageous for applications in areas such as agricultural waste processes (such as pyrolysis processes), military facilities, nuclear power plants, and automobile industries. In this paper, three major parts have been conducted to address the importance of high-temperature gas sensors and provide strategical solution for gas sensor selection. First, we have highlighted the application scenario and the sensing mechanism of various gas sensors operating at high temperature. Additionally, factors that affect sensing performance at moderate operating temperature have been investigated. Secondly, we have discussed the effect of material compositions, morphology of the nanostructures, and the use of dopants on sensing performance of high temperature gas sensors. Meanwhile, the catalytic nature of the sensing layer and temperature effect on chemisorption in oxide-based sensors have been discussed meticulously. Lastly, future challenges including factors affecting various sensor performance, selection, and preparation of sensing materials operating at higher temperatures are explored systematically.

show abstract

Section: Mems Gas Sensorsmentioning

confidence: 99%

High‐Temperature Gas Sensors for Harsh Environment Applications: A Review

Ghosh

Zhang

Hai-feng

2019

CLEAN Soil Air Water

View full text Add to dashboard Cite

show abstract

“…First, the high stability of the ceramic materials used in the developed microhotplate at high temperatures allows for the use of a wide range of technologies, up to the most extreme technological processes for synthesis MOX gas sensitive materials-for example, flame pyrolysis [42]. Additional flexibility is given by using a hot spot layout of microhotplate by a "circle" type, which allows the use of drop coating or inkjet printing technologies for the deposition of MOX for longterm stability and methods of deposition using screen printing [43]. The hot spot size of approximately 280 µm and the high mechanical strength of the YSZ membrane allows for easy screen printing.…”

Section: Discussionmentioning

confidence: 99%

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

et al. 2021

View full text Add to dashboard Cite

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

show abstract

“…After long-term experiments with wide spectres of perspective ceramics MEMS technologies [22] and materials (ZrO2 [23], Al2O3 [24], LTCC [25]) used for MEMS platforms fabrication we have chosen combination of the laser micromilling of monolithic ceramics (further will describe the result based on 99,9% Al2O3 commercially available) and printed technologies to form metallization on MEMS microhotplate and SMD package.…”

Section: Methodsmentioning

confidence: 99%

Technology of SMD MOX Gas Sensors Rapid Prototyping

Samotaev

Oblov

Veselov

et al. 2020

MSF

View full text Add to dashboard Cite

This work discusses the design of flexible laser micromilling technology for fast prototyping of metal oxide based (MOX) gas sensors in SMD packages as an alternative to traditional silicon clean room technologies. By laser micromilling technology it is possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also packages for MOX sensor, that gives complete solution for its integration in devices using IoT conception. The tests described in the work show the attainability of the stated results for the fabrication of microhotplates.

show abstract

Alumina MEMS Platform for Impulse Semiconductor and IR Optic Gas Sensors

Cited by 10 publications

References 4 publications

High‐Temperature Gas Sensors for Harsh Environment Applications: A Review

High‐Temperature Gas Sensors for Harsh Environment Applications: A Review

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

Technology of SMD MOX Gas Sensors Rapid Prototyping

Contact Info

Product

Resources

About