We have studied the imaging characteristics of an excimer laser stepper as a function of laser wavelength. Focus, magnification, distortion, CD process window, and laser performance were all examined, and an operating wavelength was selected. The self‐metrology capabilities of both the laser and stepper were tested to insure that the system would set itself to the correct wavelength upon initialization, and maintain that setting during volume production activity. The use of an on‐line stepper image s…
scite is a Brooklyn-based startup that helps researchers better discover and evaluate scientific articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by researchers from dozens of countries and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.