volume 32, issue 21, P1583-1588 1992
DOI: 10.1002/pen.760322107
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Abstract: Abstract We have studied the imaging characteristics of an excimer laser stepper as a function of laser wavelength. Focus, magnification, distortion, CD process window, and laser performance were all examined, and an operating wavelength was selected. The self‐metrology capabilities of both the laser and stepper were tested to insure that the system would set itself to the correct wavelength upon initialization, and maintain that setting during volume production activity. The use of an on‐line stepper image s…

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