Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales

Abstract

The present study covers the nanoanalysis methods for four key material characteristics: electrical and electronic properties, optical, stress and strain, and chemical composition. With the downsizing of the geometrical dimensions of the electronic, optoelectronic, and electromechanical devices from the micro to the nanoscale and the simultaneous increase in the functionality density, the previous generation of microanalysis methods is no longer sufficient. Therefore, the metrology of materials' properties with nanoscale resolution is a prerequisite in materials' research and development. The article reviews the standard analysis methods and focuses on the advanced methods with a nanoscale spatial resolution based on atomic force microscopy (AFM): current-sensing AFM (CS-AFM), Kelvin probe force microscopy (KPFM), and hybrid optical techniques coupled with AFM including tip-enhanced Raman spectroscopy (TERS), photothermal-induced resonance (PTIR) characterization methods (nano-Vis, nano-IR), and photo-induced force microscopy (PIFM). The simultaneous acquisition of multiple parameters (topography, charge and conductivity, stress and strain, and chemical composition) at the nanoscale is a key for exploring new research on structure-property relationships of nanostructured materials, such as carbon nanotubes (CNTs) and nano/microelectromechanical systems (N/MEMS). Advanced nanocharacterization techniques foster the design and development of new functional materials for flexible hybrid and smart applications.

Индуцируемые Напряжения, Возникающие В Кристаллическом Кремнии При Воздействии Ультракоротких Лазерных Импульсов Различной Длительности В Воздухе И Воде

“…Локальные напряжения, возникающие после лазерной обработки, критически влияют на структурную надежность полупроводниковых устройств [5][6][7]. Поэтому важно охарактеризовать остаточное напряжение и оптимально выбрать параметры лазерного излучения, при которых возникающие напряжения в кремнии минимальны.…”

“…Спектроскопия комбинационного рассеяния света (КРС) позволяет идентифицировать материал и дает информацию о фононной частоте, электрон-фононном взаимодействии, примеси, кристаллической структуре, ориентации кристаллов и механической деформации в материале [5][6][7][8][9][10]. Локальность данного метода при фокусировке объективами с большой числовой апертурой составляет менее 1 µm, что позволяет нам исследовать полученные лазерным путем структуры в поперечном сечении.…”

Chemical Enhancement vs Molecule–Substrate Geometry in Plasmon-Enhanced Spectroscopy

“…Raman spectroscopy is a powerful nondestructive method suitable for analytical chemistry that provides molecular fingerprinting, structural, chemical, mechanical, and thermal information about a sample. Coupled to an optical microscope, Raman spectroscopy enables chemical inspection at the microscale with exciting applications in single-cell or single-molecule investigations , and advanced nanoelectronics. − However, conventional Raman spectroscopy suffers from low signal intensity due to its inelastic scattering nature. Here is where the combination of Raman spectroscopy and plasmonics propelled the field by joining high specificity and high sensitivity .…”

Sensoric Micro and Nano Systems

“…The research topics of the contributions span from the simulation and modeling of strain‐sensing nano devices based on carbon nanotubes (CNTs) via the fundamentals of the heterogeneous integration of nano materials into MEMS test stages to miniaturized optical sensing devices . More generally, contributions touch the analysis of the nanomaterials and their interfaces to microscopic elements with advanced spectroscopy methods, novel smart‐systems integration of fludic devices based on nanomembranes and rolled‐up structures, structure formation of magnetic nanoparticles in fluids and the monolithical realization of a silicon‐based strain sensor . Additionally, two guest articles contribute to this issue: multiscale simulations of mechanical properties of CNT‐polymer matrices with finite−element methods and the defect characterization of ion‐irradiated graphite in order to study the ion resistance of carbon electronics …”

“…Copyright 2012, The Authors, published by Springer Nature. b) Reproduced with permission . Copyright 2019, Wiley‐VCH Verlag GmbH & Co. KGaA.…”