Adhesion of Contaminant Particles to Advanced Photomask Materials

Kilroy, Caitlin; Jaiswal, R. K.; Beaudoin, Stephen P.

doi:10.1109/tsm.2011.2176519

Cited by 4 publications

(5 citation statements)

References 17 publications

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“…In these cases, any possible effect of moisture on the adhesion results from the presence of subcontinuum molecularly adsorbed water. In our prior work, we have observed no effect of moisture on adhesion at the 15% RH level. , For this reason, we neglect moisture effects in the adhesion.…”

Section: Methodsmentioning

confidence: 99%

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Adhesion of Explosives

2013

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It is of increasing importance to understand how explosive particles adhere to surfaces in order to understand how to remove them for detection in airport or other security settings. In this study, adhesion forces between royal demolition explosive (cyclotrimethylenetrinitramine) (RDX), pentaerythritol tetranitrate (PETN), and trinitrotoluene (TNT) in their crystalline forms and aluminum coupons with three finishes, acrylic melamine (clear coating), polyester acrylic melamine (white coating) automotive finishes, and a green military-grade finish, were measured and modeled. The force measurements were performed using the atomic force microscopy (AFM)-based colloidal probe microscopy (CPM) method. Explosive particles were mounted on AFM cantilevers and repeatedly brought in and out of contact with the surfaces of interest while the required force needed to pull out of contact was recorded. An existing Matlab-based simulator was used to describe the observed adhesion force distributions, with excellent agreement. In these simulations, the measured topographies of the interacting surfaces were considered, although the geometries were approximated. The simulations were performed using a van der Waals force-based adhesion model and a composite effective Hamaker constant. It was determined that certain combinations of roughness on the interacting surfaces led to preferred particle-substrate orientations that produced extreme adhesion forces.

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Section: Methodsmentioning

confidence: 99%

“…In our prior work, we have observed no effect of moisture on adhesion at the 15% RH level. 38,39 For this reason, we neglect moisture effects in the adhesion.…”

Section: ■ Adhesion Force Measurementsmentioning

confidence: 99%

Adhesion of Explosives

2013

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“…The physical properties include the shape, size, and topography of the adhering bodies. Significant progress has been made in understanding and modeling the effects of the physical properties on the adhesion at the point of solid–solid contact, − as follows: The adhesion behavior is governed by the London-van der Waals (L-vdW) forces if particles and surfaces are in contact or very close to each other (separation distance < 15 nm) in dry environments. − ,− The L-vdW force arises because of induced dipole–induced dipole interactions which make the van der Waals forces ever-present in all systems. The L-vdW is a major part of the vdW-force, and it is identical to the vdW force for the case when the interacting surfaces are uncharged. The total particle–surface L-vdW force decreases as the particle size is decreased. − This is attributed to the reduced mass interacting in the vdW-active region. The topography of the interacting bodies can alter the L-vdW forces between them very significantly. − …”

Section: Introductionmentioning

confidence: 99%

“…The total particle–surface L-vdW force decreases as the particle size is decreased. − This is attributed to the reduced mass interacting in the vdW-active region.…”

Section: Introductionmentioning

confidence: 99%

“…A particle approaching the chemical interfaces, as shown in Figure , will have different affinities toward different parts of the surface. After Hamaker’s work to determine the L-vdW forces for a smooth particle interacting with chemically homogeneous surfaces, many researchers have applied Hamaker’s additive approach to determine the L-vdW forces for particle–surface systems with varied physical parameters such as geometries, orientations, and surface morphologies. − ,, There are comparatively very few studies of the adhesion dynamics of a particle approaching a surface with different chemical interfaces. , A detailed understanding of particle adhesion to a chemical interface can be utilized to guide and manipulate the path lines of approaching particles (within the vdW region) to enable their selective adhesion in different applications.…”

Section: Introductionmentioning

confidence: 99%

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London-van der Waals Force Field of a Chemically Patterned Surface To Enable Selective Adhesion

Jaiswal

Beaudoin

2018

Langmuir

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The London-van der Waals (L-vdW) force between a particle and a surface strongly depends on the topography and the chemical properties of the interacting surfaces. Although a great deal of work has been done to understand the effect of topographical heterogeneity on the L-vdW adhesion, the role of chemical heterogeneity has been discussed only rarely. This study makes an attempt to quantify the magnitude and range of the L-vdW force acting on a spherical particle in the vicinity of a chemically patterned surface. Specifically, an ideal system of a smooth spherical particle approaching a surface composed of parallel stripes of chemically distinct materials with different Hamaker constants is considered. The L-vdW forces for such systems are determined by solving the London dispersion potential for the entire volumes of the adhering bodies from first principles, using Hamaker's microscopic approach. The computational results elucidate that a chemical interface can apply a tangential L-vdW force, in addition to the normal L-vdW force, on nearby particles. This can cause lateral motion of particles neighboring a chemically inhomogeneous surface. The magnitude of the tangential L-vdW force is found to be maximum when the particle is centered at the interface and shows a gradual drop as it moves away from this location. The magnitude and range of the tangential L-vdW force can be large for large colloidal particles in close contact with a chemically patterned surface whose materials have distinct Hamaker constants. This study suggests that the tangential L-vdW force field generated by a chemical interface can be utilized as a tool to manipulate the path of an approaching particle to facilitate selective adhesion.

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