Acoustic Wave Based MEMS Devices, Development and Applications

Voiculescu, Ioana; Nordin, Anis Nurashikin

doi:10.5772/28214

Cited by 5 publications

(7 citation statements)

References 53 publications

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“…With the increase in the resonance frequency of quartz resonators, the value of the Q factor decreases. The best quartz resonators (whose production is complex and expensive) with a frequency of 10 MHz have Q=10 6 . The series resistance of quartz resonators is 50 , whereas the frequency stability, at best 1 ppm, in the temperature range of 100C may be achieved by choosing the optimum oscillating mode and crystal cut.…”

Section: Rf Mems Resonators -A Short Overview Of Existing Components mentioning

confidence: 99%

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RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Jokić¹,

Frantlović²,

Đurić

et al. 2015

FACTA U EE

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During the past two decades a considerable effort has been made to develop radio-frequency (RF) resonators which are fabricated using the micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to replace conventional large off-chip components in wireless transceivers and other high-speed electronic systems. The first part of the paper presents an overview of RF MEMS and NEMS resonators, including those based on two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS resonators is then analyzed. Improvements that would be necessary in order for MEMS/NEMS resonators to meet the requirements of wireless systems are also discussed. The analysis of noise of RF MEMS/NEMS resonators and oscillators is especially important in modern wireless communication systems due to increasingly stringent requirements regarding the acceptable noise level in every next generation. The second part of the paper presents the analysis of adsorption-desorption (AD) noise in RF MEMS/NEMS resonators, which becomes pronounced with the decrease of components' dimensions, and is not sufficiently elaborated in the existing literature about such components. Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will be presented, with a special emphasize on the influence of the resonator AD noise on the oscillator phase noise. [Projekat Ministarstva nauke Republike Srbije, br. TR 32008]

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Section: Rf Mems Resonators -A Short Overview Of Existing Components mentioning

confidence: 99%

“…It is greater in FBAR resonators than in LBARs. AlN resonators have a slightly smaller coupling coefficient than ZnO and PZT components, but their piezoelectric properties are excellent and they are suitable for high-frequency applications [6].…”

Section: Rf Mems Resonators -A Short Overview Of Existing Components mentioning

confidence: 99%

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Jokić¹,

Frantlović²,

Đurić

et al. 2015

FACTA U EE

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“…For simplification of an RLC circuit, the quality factor can be calculated as the ratio of the series resonance frequency to the two-sided 3dB bandwidth as shown in Eqn. (18). Figure 7 illustrates the typical admittance and phase to evaluate the performance of the SAW and BAW resonator [29].…”

Section: Design Conceptmentioning

confidence: 99%

“…A stack of reflectors in CMOS and external matching circuits were implemented. However, further improvements are needed to increase the Q factor to meet the requirements of commercial communication devices that have quality factor in the 10,000 range [18].…”

Section: Integrated Cmos Saw Resonatormentioning

confidence: 99%

“…Complete integration into a single chip offers 1) low manufacturing cost due to single chip integration at large volume production 2) remarkable performance by reducing the parasitic effects and poor interfacing 3) value-added functionality because it enables multiband configurations, and 4) device sensitivity improvement [14]. Precise resonant frequency, low insertion loss and high quality factors in the range of 10,000 are three crucial requirements for a resonator in the wireless transceiver system [18]. Hence, this paper highlights the previous works on silicon based acoustic wave resonators that have been of great interest for the miniaturization of transceivers.…”

Section: Introductionmentioning

confidence: 99%

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Silicon Compatible Acoustic Wave Resonators: Design, Fabrication and Performance

Ralib¹,

Nordin²

2014

IIUMEJ

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Continuous advancement in wireless technology and silicon microfabrication has fueled exciting growth in wireless products. The bulky size of discrete vibrating mechanical devices such as quartz crystals and surface acoustic wave resonators impedes the ultimate miniaturization of single-chip transceivers. Fabrication of acoustic wave resonators on silicon allows complete integration of a resonator with its accompanying circuitry.Â Integration leads to enhanced performance, better functionality with reduced cost at large volume production. This paper compiles the state-of-the-art technology of silicon compatible acoustic resonators, which can be integrated with interface circuitry. Typical acoustic wave resonators are surface acoustic wave (SAW) and bulk acoustic wave (BAW) resonators.Â Performance of the resonator is measured in terms of quality factor, resonance frequency and insertion loss. Selection of appropriate piezoelectric material is significant to ensure sufficient electromechanical coupling coefficient is produced to reduce the insertion loss. The insulating passive SiO2 layer acts as a low loss material and aims to increase the quality factor and temperature stability of the design. The integration technique also is influenced by the fabrication process and packaging.Â Packageless structure using AlN as the additional isolation layer is proposed to protect the SAW device from the environment for high reliability. Advancement in miniaturization technology of silicon compatible acoustic wave resonators to realize a single chip transceiver system is still needed. ABSTRAK: Kemajuan yang berterusan dalam teknologi tanpa wayar dan silikon telah menguatkan pertumbuhan yang menarik dalam produk tanpa wayar. Saiz yang besar bagi peralatan mekanikal bergetar seperti kristal kuarza menghalang pengecilan untuk merealisasikan peranti cip. Silikon serasiÂ gelombang akustik resonator mempunyai potensi yang besar untuk menggantikan unsur-unsur diskret kerana keupayaan untuk mengintegrasikan dengan litar yang disertakan itu. Integrasi ini membawa kepada peningkatan prestasi, fungsi yang lebih baik dengan pengurangan kos pada pengeluaran jumlah yang besar. Oleh itu, Karya ini mengkaji silikon resonator akustik yang serasi, yang bersepadu dengan muka litar untuk membolehkan integrasi yang lengkap. Resonator gelombang akustik yang digunakan adalah gelombang permukaan akustik ( SAW ) dan gelombang akustik pukal ( BAW ) resonator . Kriteria penting untuk menilai prestasi resonator seperti faktor kualiti, frekuensi resonans dan kehilangan sisipan juga digariskan dalam setiap kerja sebelumnya. Pemilihan bahan piezoelektrik yang sesuai adalah penting untuk memastikan pekali gandingan elektromekanik yang mencukupi dihasilkan untuk mengurangkan kehilangan sisipan. Lapisan tambahan pasif SiO2Â Â yang bertindak sebagai bahan rendah sisipan dipercayai meningkatkan faktor kualiti dan kestabilan suhu reka bentuk. Teknik integrasi juga dipengaruhi oleh proses fabrikasi dan pembungkusan. Struktur tanpa pembungkusan menggunakan AlN sebagai lapisan pengasingan tambahan itu dicadangkan untuk melindungi peranti SAW dari persekitaran untuk kebolehpercayaan yang tinggi. Banyak lagi kemajuan perlu dilakukan dalam pengecilan silikon serasi resonator gelombang akustik untuk merealisasikan sistem cip transceiver tunggal.KEYWORDS: RF-MEMS; piezoelectric; resonator; surface acoustic wave (SAW);bulk acoustic wave (BAW); FBAR

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Dispersion of Love waves in size-dependent substrate containing finite piezoelectric and viscoelastic layers

Goyal

Kumar

2019

Int J Mech Mater Des

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Acoustic Wave Based MEMS Devices, Development and Applications

Cited by 5 publications

References 53 publications

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

RF MEMS/NEMS resonators for wireless communication systems and adsorption-desorption phase noise

Silicon Compatible Acoustic Wave Resonators: Design, Fabrication and Performance

Dispersion of Love waves in size-dependent substrate containing finite piezoelectric and viscoelastic layers

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