Achieving super resolution lithography based on bulk plasmon polaritons of hyperbolic metamaterials

Hu, Jinlei; Liu, Zhenxing; Hu, Zheng-Da; Wu, Jingjing; Wang, Jicheng

doi:10.1016/j.optmat.2022.112536

Cited by 6 publications

(2 citation statements)

References 44 publications

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“…In this case, the HMM becomes an anisotropic medium with different permittivities in the xy and z directions, and the dispersion relation becomes hyperbolic [30]. By utilizing such properties, various applications beyond the diffraction limit, such as imaging [14,31], photolithography [32,33], biosensors [34], and solar absorption [35], have been proposed. In the realm of composite materials with metals and dielectrics, nanocermet structures are also employed as metamaterials.…”

Section: Introductionmentioning

confidence: 99%

Novel Plasmonic Metamaterials Based on Metal Nano-Hemispheres and Metal-Dielectric Composites

Niguma,

Matsuyama,

Wada

et al. 2024

Photonics

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We introduce a groundbreaking plasmonic metamaterial, the Nano-Hemisphere on Hyperbolic Metamaterial (NHoHMM), which involves the fabrication of Ag nano-hemispheres on a multilayered Ag/SiO2 structure, achieved solely through sputtering and heat treatment. Finite Difference Time Domain (FDTD) simulations unveil the intriguing slow propagation of the localized electric field, where light travels at only 1/40th of its usual speed within this structure. These simulations reveal distinctive sharp absorption peaks in the visible spectrum, attributed to surface plasmon resonance. In practical experiments, the NHoHMM structure, characterized by random Ag nano-hemispheres, exhibits broad absorption peaks spanning the visible range, rendering it a versatile broadband optical absorber. For comparison, the optical properties of the Ag nano-hemispheres on a nanocermet (NHoNC) structure were analyzed through simultaneous sputtering of Ag and SiO2 followed by heat treatment. Simulations employing effective medium theory and the transfer matrix method demonstrate variable optical properties dependent on the Ag filling ratio in the nanocermet structure. The results obtained differ from the spectra of the NHoHMM structure; thus, it is concluded that in the NHoHMM structure, the calculated multi-peaks are broadened due to the inhomogeneity of the nano-hemispherical structure’s size, rather than the metal/dielectric multilayer structure being altered by the heat treatment.

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Section: Introductionmentioning

confidence: 99%

Novel Plasmonic Metamaterials Based on Metal Nano-Hemispheres and Metal-Dielectric Composites

Niguma,

Matsuyama,

Wada

et al. 2024

Photonics

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“…This excludes synthetic oil, which is made from long chain α-olefins [5]. PMP demonstrates excellent optical transparency, electrical insulation properties, a high melting point, low surface tension, and a high permeability towards gases and general inertness and can therefore be used as an optical material [6], gas separation membrane [7][8][9], microelectronics and microsystems material [10], hydrogen storage material [11], blood contact material for medical apparatus [12], and so on. Isotactic PMP has a melting point of ~240 • C and a glass transition temperature of ~35 • C. However, there is usually a part of the polymer that does not crystallize.…”

Section: Introductionmentioning

confidence: 99%

Polymerization of Allyltrimethylisilane and 4-Methyl-1-Pentene by Using Metallocene Catalysts

et al. 2023

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Polymers of higher olefin, obtained by Ziegler-type polymerization, have been used in some critical fields, e.g., as the membrane for extracorporeal membrane oxygenation (ECMO), which plays an important role in the treatment of patients with severe COVID-19. The polymer obtained by a single-site catalyst, e.g., metallocene catalysts, demonstrated a higher performance. The homo- and co-polymerization of allyltrimethylisilane (ATMS) and 4-methyl-1-pentene (4M1P) were conducted using syndiospecific (cat 1) and isospecific (cat 2) metallocene catalysts. Cat 1 showed low conversions and provided a polymer with a higher molecular weight, while cat 2 behaved oppositely. 13C-NMR spectra certified the stereotacticity of the resultant polymer, and the resonance of the carbon atom of CH2 (αα’) between the two tertiary carbon atoms of the ATMS and 4M1P units were observed. This could be the evidence of the formation of a true copolymer. The crystallization of the polymer was explored using a differential scanning calorimeter (DSC) and wide angle X-ray diffraction (WAXD). All homopolymers and some of the copolymers showed high melting temperatures and low melting enthalpies. The WAXD patterns of the syndiotactic polymer and isotactic homopolymer or the ATMS-rich copolymer were consistent with the reported literature, but the isotactic 4M1P-rich copolymer provided the crystal form I, which is unusual for a 4M1P polymer without any pretreatment.

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Narrow-area average method for measurement of the propagation length of surface plasmon polaritons using nanoslit-grating structures

Dong¹,

Zhang²,

Yang³

2023

Results in Physics

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Achieving super resolution lithography based on bulk plasmon polaritons of hyperbolic metamaterials

Cited by 6 publications

References 44 publications

Novel Plasmonic Metamaterials Based on Metal Nano-Hemispheres and Metal-Dielectric Composites

Novel Plasmonic Metamaterials Based on Metal Nano-Hemispheres and Metal-Dielectric Composites

Polymerization of Allyltrimethylisilane and 4-Methyl-1-Pentene by Using Metallocene Catalysts

Narrow-area average method for measurement of the propagation length of surface plasmon polaritons using nanoslit-grating structures

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