volume 18, issue 9, P2755-2761 2007
DOI: 10.1088/0957-0233/18/9/003
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Abstract: The scanning electron microscope (SEM) and transmission electron microscope (TEM) are very powerful tools for the nanoscale characterization of materials. To make the best use of these capabilities, it is necessary to understand the nature of the uncertainties in the measurement process and to allow for errors during the data capture and data analysis stages of the measurement. By using replicated measurements and statistical analyses, it is possible to address repeatability and reproducibility issues and to a…

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