A transducer based upon vacuum tunneling

Stephenson, Kendall A.; Bocko, Mark F.

doi:10.1109/sensor.1991.148893

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

DOI: 10.1109/sensor.1991.148893

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A transducer based upon vacuum tunneling

Kendall A. Stephenson

Mark F. Bocko

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A transducer based upon vacuum tunneling

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