DOI: 10.32657/10356/36008
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Abstract: Chemical Etching (CE) is an important production process for the fabrication of electronic devices. CE process is widely applicable in the manufacturing of integrated circuit (IC) devices, micro-electro-mechanical-system (MEMS) devices, production of shadow mask for color TV etc. Wet chemical etching (WCE) is widely used CE process due to its low cost, high etch rate and good selectivity compared to other existing CE processes. WCE process involves dissolution of substrate by chemical reaction with liquid chem…

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