A Thermal-Stress FEM to Predict Aging in Packaged MEMS Resonators

Segovia-Fernandez, Jeronimo; Suzuki, Yutaka; Chowdhury, Mahmud; Rojas, Javier; Yen, Ernest Ting-Ta

doi:10.1109/eftf/ifcs54560.2022.9850808

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…However this approach is purely experimental, statistic-heavy, and lacking of physical explanations. In [149] Segovia-Fernandez et al presented a novel accelerated aging test method based on the time-temperature superposition principle. The method models the relaxation of viscoelastic materials and their impact to package stress over time, then uses this information to predict the aging of DBAR oscillators.…”

Section: E Long-term Stabilitymentioning

confidence: 99%

From Microwave Acoustic Filters to Millimeter-Wave Operation and New Applications

et al. 2023

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This paper reviews the latest developments in microwave acoustic wave devices. After an introduction and brief history of bulk acoustic wave (BAW) and surface acoustic wave (SAW) devices, a review is given for guided SAWs and XBARs -two new technologies, which are promising for future 5G applications. Following this, we discuss recent simulation techniques, such as 3D finite element method (3D FEM) and simulation of nonlinearities, as well as filter synthesis. Next, a review on tunable and reconfigurable acoustics is given. Finally, we present the latest developments in microwave acoustics for millimeter-wave (mm-wave) operation as well as BAW oscillators.INDEX TERMS Bulk acoustic wave (BAW) devices, filter, filter-synthesis, front-end, high power, MTT 70th Anniversary Special Issue, multiplexer, nonlinearity, resonator, surface acoustic wave (SAW) devices.

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Section: E Long-term Stabilitymentioning

confidence: 99%