A Switched-Mode Power Amplifier for Ion Energy Control In Plasma Etching

Abstract

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Accurate Ion Energy Control in Plasma Processing by Switched-Mode Power Converter

“…In addition, a tuned matching network unit is required in order to match the impedance of the linear amplifier and the plasma reactor [8]. Recently, a switchedmode power converter (SMPC) has been designed in [9] to generate the tailored waveform, which not only increases the energy efficiency significantly but also removes the matching network. The capacitive plasma reactor load and the stray inductance in the loop could cause severe resonance trigger by the voltage pulse of the tailored waveform.…”

Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter

“…For a typical dielectric substrate, the tailored pulse-shape voltage waveform has proved to be a proper output waveform for the converter [2]- [5]. A switched-mode power converter (SMPC) is proposed in [6] to generate this waveform, which has significant higher efficiency compared to the traditionally used linear amplifier. Besides, it omits the requirement of matching network since the converter is quasi-dc.…”

Auto-Tuning Control of a Switched-Mode Power Converter for Tailored Pulse-Shape Biased Plasma Etching Applications

“…The voltage pulse is used to swiftly discharge the substrate. Switched-mode power converters (SMPC) can be used to generate this waveform [18]. Under a fixed operating condition, there is an optimal voltage slope rate in the etching phase to obtain the narrowest IED.…”