A surface acoustic wave gyro sensor

Gyroscopes based on surface acoustic waves

“…According to their functional principles, SAW gyroscopes are categorized into different types such as standing-wave-mode type gyroscopes, progressive-wave-mode type gyroscopes, and multi-axis detectable SAW gyroscopes, all of which are introduced in this article [10][11][12][13][14][15][16][17][18][19].…”

“…SAW gyroscope using standing wave mode Kurosawa et al [10] suggested a novel SAW gyroscope design concept using the standing wave mode, which has a metallic dot array within the cavity, as depicted in Figure 1. When the standing wave is generated by adding two counter-propagating SAWs from the resonators, particles vibrate tangentially to the surface at or near the nodes of the standing wave, whereas those at the anti-node vibrate normal to the surface.…”

“…Table 1 shows the properties of the SAW gyroscope using standing waves described above. Although Kurosawa et al [10] failed to obtain experimental results with their device, they suggested using the standing wave mode and metallic dot array to enhance the sensitivity of the SAW gyroscope. Wang et al [12,13] demonstrated a highly sensitive SAW gyroscope using a standing wave mode with two SAW oscillators to eliminate error sources such as temperature, pressure, and so on.…”

MEMS Gyroscopes for Consumers and Industrial Applications

“…Such perturbation produces a secondary standing wave polarized parallel to the substrate surface, whose amplitude is proportional to the sensor angular rate: hence, by sensing the amplitude of the secondary wave with an additional IDT, it is possible to retrieve a measurement of the input angular rate. Some design examples of SAW MEMS gyroscopes are presented in (Jose et al, 2002;Kurosawa et al, 1998;Liu & Wu, 2007).…”

State of the art and prospects for the development of SAW-based solid-state gyros

“…A great number of works was published near the year 2000. Most of them were authored by Varadan et al [2][3][4][5][6][7], who tried to implement the concept proposed by Kuro sawa in 1997 [8][9]. However, from paper to paper, the predicted sensitivity of the SSG was decreasing until the year 2001, when Woods et al showed that this concept was infeasible for most applications [10].…”