A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study

Kim, Deok Ho; Lee, Moon Gu; Kim, Byung Kyu; Sun, Yu

doi:10.1088/0964-1726/14/6/019

Cited by 155 publications

(79 citation statements)

References 30 publications

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“…This microgripper was successfully integrated in a micromanipulation system and applied in optical fiber alignment. 6 Lin et al presented a static force measurement method based on the characteristics a Electronic mail: zhangzhh@zjnu.edu.cn 2158-3226/2016/6(7)/075320/10 6, 075320-1 © Author(s) 2016.…”

Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Zhang

Kan

et al. 2016

AIP Advances

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The sensitivity enhancement of piezoelectric force sensors is investigated based on multiple piezoelectric effects in this paper. At first, theoretical analysis showed that multiple piezoelectric effects had an influence on the piezoelectric force sensors. Secondly, a practicable method was adopted to perform the experimental validation and quantify the influence of multiple piezoelectric effects. In the method, different capacitors whose capacitances became much larger than that of the piezoelectric quartz sensor were in parallel with the quartz sensor. With the method, the details of the sensitivity enhancement of piezoelectric sensors were obtained. Experimental results showed that the sensor sensitivity increased from 4.00 pC/N to 4.07 pC/N when the capacitance of parallel capacitors was increased from 500 to 1000 and then 5000 times of that of the sensor. The force sensor sensitivity was improved by 1.75%. However, the nonlinearity and repeatability error of the force sensor were markedly increased with increasing the capacitance of the parallel capacitor. The method demonstrated that the piezoelectric force sensor sensitivity could be enhanced to a certain extent in the practical engineering, but it also brought some negative effects. Finally, further analysis indicated that multiple piezoelectric effects influenced the sensitivity by changing the piezoelectric coefficient. The well-known piezoelectric coefficient d11 of the quartz could actually reach 2.35 pC/N.

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Section: Introductionmentioning

confidence: 99%

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Zhang

Kan

et al. 2016

AIP Advances

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“…Moreover, unlike the relationship between displacement and force of the other three types of actuators, the force output of EMA is adjustable under a fixed displacement output by changing the applied current [23]. This property can be used in the control system, which emphasizes robustness [24].…”

Section: Electromagnetic Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…Piezoresistive touch sensors are used in contact detection by monitoring resistance changes that occur when a mechanical force is applied to the sensing material [37,38]. By integrating piezoresistive materials into end-effectors, contact can be established by monitoring resistance changes of the piezoresistors as the end-effector undergoes mechanical stress from end-effector deformation when contacting the substrate.…”

Section: Contact Sensor Equipped Manipulation Toolsmentioning

confidence: 99%

Contact detection for nanomanipulation in a scanning electron microscope

2012

Ultramicroscopy

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A major difficulty in the fabrication of nanostructure based electronics is the lack of effective processes capable of precisely arranging nanostructures into predefined positions. Top-down approaches introduce increased complexity and a high cost for practical industrial use, while bottom-up approaches are probabilistic in nature and do not provide precise control of nanostructure properties (i.e., number, diameter), which influence device performance.Alternatively, nanomanipulation promises specificity, precision and programmed motion and its automation may facilitate the large-scale fabrication of nanostructure based devices.This study focuses on the development of an automated contact detection algorithm which positions an end-effector in contact with a target surface without the need for additional equipment, devices or sensors. We demonstrate this algorithm as an enabling feature for automated nano-FET biosensor construction with precise control over nanowire parameters thereby reducing device-to-device variability and also potentially allowing us to optimize individual device performance.iii

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A superelastic alloy microgripper with embedded electromagnetic actuators and piezoelectric force sensors: a numerical and experimental study

Cited by 155 publications

References 30 publications

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Sensitivity enhancement of piezoelectric force sensors by using multiple piezoelectric effects

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Contact detection for nanomanipulation in a scanning electron microscope

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