A Study of Abrasive Jet Micro-Grooving of Quartz Crystals

Moridi, Alireza; Wang, Jun; Ali, Y.M.; Mathew, P.; Li, Xiao Ping

doi:10.4028/www.scientific.net/kem.443.645

Cited by 8 publications

(9 citation statements)

References 13 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, extreme abrasive flow rate results into inter-particle crashes which reduce the average MRR per particle. The kerf taper angle decreased with growing the abrasive mass flow rate [5]. MRR is increased with increase in mass flow rate of the abrasive [7].…”

Section: Measurement Of the Effect Of Controlling Parameters On Perfomentioning

confidence: 99%

See 1 more Smart Citation

Measurement of the Effect of Controlling Parameters on Performance of Abrasive Jet Machine

Chaudhari,

Patel,

Patel

2020

IJITEE

View full text Add to dashboard Cite

Abrasive Jet Machine (AJM) widely used for cutting brittle materials. The present study focus on experimental investigation for performance parameters like Material Removal Rate (MRR) and Surface Roughness (SR) with variation in controlling parameters.Here, air pressure, abrasive particle temperature and speed of mixing chamber considered as controlling parameters for measurement of their effects on performance parameters of AJM. Compare to conventional method of AJM, unique feature of heating jacket and rotary mechanism provided in the newly developed AJM for experimental purpose. Experimental results reveal that the MRR and SR gets increased with increase in pressure, temperature and speed of mixing chamber.

show abstract

Section: Measurement Of the Effect Of Controlling Parameters On Perfomentioning

confidence: 99%

“…As the abrasive jet enters into the work piece, it drops its kinetic energy; therefore, the kerf becomes thinner, and a taper is formed on the kerf. Smaller kerf taper angle observed due to higher air pressure [5]. MRR increased with increase in the air pressure [2,3,4,6,7,11,14,15,16,17,19,20,21,22,23].…”

Section: Introductionmentioning

confidence: 99%

Measurement of the Effect of Controlling Parameters on Performance of Abrasive Jet Machine

Chaudhari,

Patel,

Patel

2020

IJITEE

View full text Add to dashboard Cite

show abstract

“…It has been found that the predicted models provide good results for the range of conditions tested in this study. [14].…”

Section: Fig6-abrasive Jet Machined Profilementioning

confidence: 99%

A Research Review on Advanced Approches in Abrasive Jet Machining

Prasad¹,

Ravindranath²,

Devakumar³

2016

IOSR

View full text Add to dashboard Cite

In the advanced areas of space, missile and nuclear technologies, there arise a need for machining components to maintain exact sharp edges, high accuracy, and precisely sized components. In the present era of modern machining, these requirements can be achieved with the help of advanced machining process like Abrasive Jet Machining (AJM).This paper presents an extensive review of the current state of research and development on abrasive jet machining process.

show abstract

“…However, the high degree of anisotropy, the trigonal symmetry of the quartz crystal and large etch rate hinder its study and use. Recently, a few micromachining processes such as laser beam machining (LBM) [ 14 ], abrasive jet machining (AJM) [ 15 , 16 ] and electrochemical discharge machining (ECDM) [ 17 , 18 , 19 , 20 , 21 ] have been studied for realizing micro-structures on quartz substrate. Though the etching rate is overtly improved with these technologies, it is not suitable for manufacturing complex structures and mass production.…”

Section: Introductionmentioning

confidence: 99%

Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Zhao

et al. 2020

Micromachines

View full text Add to dashboard Cite

Quartz is widely used in microelectromechanical systems (MEMS). Especially, MEMS quartz resonators are applied to sensors and serve as sensitive elements. The capability of deep etching is a limitation for the application. Presented in this paper is a deep and high accuracy reactive ion etching method applied to a quartz resonator etching process with a Cr mask. In order to enhance the capability of deep etching and machining accuracy, three kinds of etching gas (C4F8/Ar, SF6/Ar and SF6/C4F8/Ar), bias power, inductively coupled plasma (ICP) power and chamber pressure were studied in an industrial reactive ion etching machine (GDE C200). Results indicated that the SF6/C4F8/Ar chemistry gas is the suitable and optimal choice. Experiment results indicate that Cr (chromium) mask can obtain a higher selectivity than aluminum and titanium mask. A “sandwich” structure composed of Al layer-Cr layer-Al layer-Cr layer was proposed. The Al (aluminum) film can play the role of releasing stress and protecting gold electrodes, which can enhance the thickness of metal mask. An optimized process using SF6/C4F8/Ar plasmas showed the quartz etching rate of 450 nm/min. Meanwhile, a microchannel with a depth of 75.4 µm is fabricated, and a nearly vertical sidewall profile, smooth surface is achieved.

show abstract

A Study of Abrasive Jet Micro-Grooving of Quartz Crystals

Cited by 8 publications

References 13 publications

Measurement of the Effect of Controlling Parameters on Performance of Abrasive Jet Machine

Measurement of the Effect of Controlling Parameters on Performance of Abrasive Jet Machine

A Research Review on Advanced Approches in Abrasive Jet Machining

Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication

Contact Info

Product

Resources

About