Hydrogen ion beams have been discussed as useful for scanning ion microscopy because of hydrogen's low mass and low sputtering rates. Hydrogen ion beams have been reported from various nanotips including pure iridium tips and noble metal covered tungsten tips.[1, 2] However, hydrogen ion beams are known to occur as mixtures of H + , H2 + and H3 + depending on the electric field strength.[3] There is some evidence that various tip orientations contribute differently to the ratios of the ions and also that site specific regions also affect the gas species but it has not been clearly determined. Understanding the relationship between tip shape and apex termination with specific hydrogen ion creation is important in order to prepare pure hydrogen ion beams of a single species. This would be beneficial to future applications related to hydrogen ion beam production using gas field ion sources. In this manuscript, we prepared various nanotips, including single atom tips, trimers and other structures and compared the contents of hydrogen ion beams. The beam contents were separated using a magnetic field in order to compare the ratios of H + , H2 + and H3 + .