A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

Azevedo, Robert G.; Jones, D.G.; Jog, Anand V.; Jamshidi, B.; Myers, David R.; Chen, Li; Fu, Xiao‐An; Mehregany, Mehran; Wijesundara, Muthu B. J.; Pisano, Albert P.

doi:10.1109/jsen.2007.891997

Cited by 162 publications

(100 citation statements)

References 21 publications

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“…This will result in a larger v i × B ext contribution along the center (symmetry) line, resulting in a pulse in the middle of the x 2 -direction (Figs. 4 and 7) v o e 3 …”

Section: A Model Problemmentioning

confidence: 99%

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Electromagnetically-induced Deformation of Functionalized Fabric

Zohdi

2011

J Elast

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This work investigates the deformation of charged fabric via external electromagnetic fields. A reduced-order model is constructed by combining a yarn-segment network representation with dynamic discrete/lumped charged-masses. The deformation of the fabric is dictated by solving a coupled system of differential equations for the motion of the lumped charged-masses, which are coupled through the yarn-segments. Initially, the effects of the electric and magnetic fields are analytically studied for the components (yarnsegment network and charged-masses) that comprise the model. Quantitative numerical simulations are then provided for the entire, assembled, larger-scale, coupled system, based on a computationally-efficient time-stepping algorithm. The model is relatively easy to implement and provides analysts with a straightforward tool to study electromagnetic fabric systems.

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“…This will result in a larger v i × B ext contribution along the center (symmetry) line, resulting in a pulse in the middle of the x 2 -direction (Figs. 4 and 7) v o e 3 …”

Section: A Model Problemmentioning

confidence: 99%

“…Applications for such materials are driven by the extensive sensor, actuator and MEMS industries. See, for example, Rebeiz et al [32], Quandt and Ludwig [31], Grimes et al [13] and Kouzoudis and Grimes [21,22], Azevedo et al [3], Jones et al [20] and Myers et al [25] for specific applications.…”

mentioning

confidence: 99%

Electromagnetically-induced Deformation of Functionalized Fabric

Zohdi

2011

J Elast

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“…MEMS resonators have also been previously employed as transducers in accelerometers, gyroscopes, strain sensors, electrometers and gravimetric sensors [7,9,[16][17][18][19]. A low power front-end interface circuit [11] for such resonators thus has broad applicability to a variety of sensing contexts.…”

Section: Introductionmentioning

confidence: 99%

Vacuum Packaged Low-Power Resonant MEMS Strain Sensor

Erbes

Yan

et al. 2016

J. Microelectromech. Syst.

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Abstract-This paper describes a technical approach towards the realization of a low-power temperature-compensated micromachined resonant strain sensor. The sensor design is based on two identical and orthogonally-oriented resonators where the differential frequency is utilized to provide an output proportional to the applied strain with temperature compensation achieved to first order. Interface circuits comprising of two front-end oscillators, a mixer and low-pass filter are designed and fabricated in a standard 0.35µm CMOS process. The characterized devices demonstrate a scale factor of 2.8Hz/µε over a strain range of 1000µε with excellent linearity over the measurement range. The compensated frequency drift due to temperature is reduced to 4% of the uncompensated value through this scheme. The total continuous power consumption of the strain sensor is 3µW from a 1.2V supply. This low power implementation is essential to enable battery-powered or energy harvesting enabled monitoring applications.

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“…13 This makes SiC extremely interesting for applications in harsh environments. 14 In this work, we propose horizontal slot waveguides that make use of SiC as the high refractive index material. We show that the fabricated slot waveguides have a high tolerance to dimension deviations during fabrication and do not require etching of the high refractive index regions.…”

mentioning

confidence: 99%

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

2012

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Abstract. We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO 2 -SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB∕cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in the slot. This simulation revealed that SiC-based slot waveguides can be used, advantangeously, for sensing as the confinement strongly varies with the refractive index of the slot material. A confinement factor change of 0.15∕refractive index units was measured for different slot materials.

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A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

Cited by 162 publications

References 21 publications

Electromagnetically-induced Deformation of Functionalized Fabric

Electromagnetically-induced Deformation of Functionalized Fabric

Vacuum Packaged Low-Power Resonant MEMS Strain Sensor

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

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