A Rapid Design and Fabrication Method for a Capacitive Accelerometer Based on Machine Learning and 3D Printing Techniques

Liu, Guandong; Wang, Changhai; Jia, Zhiyan; Wang, Kexin; Ma, Wei; Li, Zhe

doi:10.1109/jsen.2021.3085743

Cited by 11 publications

(6 citation statements)

References 50 publications

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“…Recently, various 3D printing techniques have been utilized to fabricate sensors. Liu et al utilized multimaterial fused deposition modeling (FDM) to create capacitive accelerometers that can detect and monitor human motion 44 . Kamat et al employed selective laser melting (SLM) to produce flexible piezoresistive microelectromechanical system (MEMS) force sensors that can be integrated into razors 45 .…”

Section: Introductionmentioning

confidence: 99%

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Hou,

Zhu,

et al. 2024

Microsyst Nanoeng

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The emergence of microhemispherical resonant gyroscopes, which integrate the advantages of exceptional stability and long lifetime with miniaturization, has afforded new possibilities for the development of whole-angle gyroscopes. However, existing methods used for manufacturing microhemispherical resonant gyroscopes based on MEMS technology face the primary drawback of intricate and costly processing. Here, we report the design, fabrication, and characterization of the first 3D-printable microhemispherical shell resonator for a Coriolis vibrating gyroscope. We remarkably achieve fabrication in just two steps bypassing the dozen or so steps required in traditional micromachining. By utilizing the intricate shaping capability and ultrahigh precision offered by projection microstereolithography, we fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult to obtain via MEMS technology. In addition, the resonance frequency of the fabricated resonators can be tuned by electrostatic forces, and the fabricated resonators exhibit a higher quality factor in air than do typical MEMS microhemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing microhemispherical shell resonators, paving the way for the development of microhemispherical resonator gyroscopes for portable inertial navigation. Moreover, this particular design concept could be further applied to increase uptake of resonator tools in the MEMS community.

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Section: Introductionmentioning

confidence: 99%

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Hou,

Zhu,

et al. 2024

Microsyst Nanoeng

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“…MEMS capacitive accelerometers play an important role in inertial measurement units [1][2][3], platform stabilization systems [4][5][6][7][8][9][10], structural health monitoring [11][12][13][14][15], and tilt sensing [16,17]. In these applications, the MEMS capacitive accelerometers are powered by batteries; thus, high power efficiency is required to extend the battery life.…”

Section: Introductionmentioning

confidence: 99%

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

Li,

Lai,

Wang

et al. 2023

Sensors

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A capacitance-to-voltage converter (CVC) is proposed in this paper and applied to a readout circuit for a micro-electro-mechanical system (MEMS) accelerometer to improve the power efficiency. In a traditional readout circuit, the front-end CVC has to operate at a high sampling frequency to resist thermal noise deterioration due to the large parasitic capacitance introduced by the mechanical sensing element. Thus, the back-end analog-to-digital converter (ADC) also has to operate at a high sampling frequency to avoid noise aliasing when sampling the output signal of the CVC, which leads to high power consumption. The average CVC technique is proposed in this paper to reduce the sampling frequency requirement of the back-end ADC and thus reduce the power consumption. Both the traditional readout circuit and the proposed readout circuit are simulated with a commercial 0.18 μm BCD process. The simulation results show that noise aliasing occurs, and the noise power spectral density (PSD) of the traditional readout circuit increases by 12 dB when the sampling frequency of back-end ADC is reduced by 24 dB. However, in the proposed readout circuit, a noise aliasing effect does not occur. Moreover, the proposed readout circuit reduces the power consumption by 53% without thermal noise deterioration. In addition, the proposed CVC circuits are fabricated in an 0.18 μm BCD process, and the test results show that the presented readout circuit based on the average CVC technique can obtain better performance than the traditional CVC-based readout circuit.

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“…Nevertheless, a variety of AM techniques has been successfully applied to the fabrication of MEMS [8][9][10]. The production of inertial sensors has been demonstrated using techniques like stereolithography (SLA) [11][12][13][14], fused deposition modelling (FDM) [15][16][17], multijet printing (MJP) [18] and two-photon lithography (TPL) [19].…”

Section: Introductionmentioning

confidence: 99%

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

Bernasconi,

Invernizzi,

Gallo Stampino

et al. 2023

Micromachines

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In the last few years, the manufacturing of microelectromechanical systems (MEMS) by means of innovative tridimensional and bidimensional printing technologies has significantly catalyzed the attention of researchers. Inkjet material deposition, in particular, can become a key enabling technology for the production of polymer-based inertial sensors characterized by low cost, high manufacturing scalability and superior sensitivity. In this paper, a fully inkjet-printed polymeric accelerometer is proposed, and its manufacturing steps are described. The manufacturing challenges connected with the inkjet deposition of SU-8 as a structural material are identified and addressed, resulting in the production of a functional spring-mass sensor. A step-crosslinking process allows optimization of the final shape of the device and limits defects typical of inkjet printing. The resulting device is characterized from a morphological point of view, and its functionality is assessed in performing optical readout. The acceleration range of the optimized device is 0–0.7 g, its resolution is 2 × 10−3 g and its sensitivity is 6745 nm/g. In general, the work demonstrates the feasibility of polymeric accelerometer production via inkjet printing, and these characteristic parameters demonstrate their potential applicability in a broad range of uses requiring highly accurate acceleration measurements over small displacements.

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A Rapid Design and Fabrication Method for a Capacitive Accelerometer Based on Machine Learning and 3D Printing Techniques

Cited by 11 publications

References 50 publications

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

High-Power-Efficiency Readout Circuit Employing Average Capacitance-to-Voltage Converter for Micro-Electro-Mechanical System Capacitive Accelerometers

Printing MEMS: Application of Inkjet Techniques to the Manufacturing of Inertial Accelerometers

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