A novel microfabricated high precision vector magnetometer

Ettelt, Dirk; Dodane, Guillaume; Audoin, M.; Walther, Arnaud; Jourdan, G.; Rey, Patrice; Robert, P.; Delamare, Jérôme

doi:10.1109/icsens.2011.6126925

Cited by 9 publications

(5 citation statements)

References 7 publications

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“…The main difference is the use of a thin SOI substrate with initial demonstrations carried out with a device layer thickness of 250 nm. [ 70 ] This thickness defines the NW thickness, whereas in‐plane dimensions are set during the high‐resolution lithography step (step a) followed by shallow etching (step b). A 0.3 μm‐thick oxide layer is used for encapsulating the NW (step c).…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Silicon Nanowires Driving Miniaturization of Microelectromechanical Systems Physical Sensors: A Review

et al. 2023

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The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven by global connectivity needs and is closely linked to emerging digital technologies and the Internet of Things. Strong technical advantages of miniaturization such as improved sensitivity, functionality, and power consumption are accompanied by significant economic benefits due to semiconductor manufacturing. Hence, the trend to produce smaller sensors and their driving force resemble very much those of the miniaturization of integrated circuits (ICs) as described by Moore's law. In this respect, with its IC‐, and MEMS‐compatibility, and scalability, the silicon nanowire is frequently employed in frontier research as the sensor building block replacing conventional sensors. The integration of the silicon nanowire with MEMS has thus generated a multiscale hybrid architecture, where the silicon nanowire serves as the piezoresistive transducer and MEMS provide an interface with external forces, such as inertial or magnetic. This approach has been reported for almost all physical sensor types over the last decade. These sensors are reviewed here with detailed classification. In each case, associated technological challenges and comparisons with conventional counterparts are provided. Future directions and opportunities are highlighted.

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Section: Fabrication Techniquesmentioning

confidence: 99%

Silicon Nanowires Driving Miniaturization of Microelectromechanical Systems Physical Sensors: A Review

et al. 2023

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“…Some solutions were outlined in [6][7][8]. The challenges remain to ensure specified performance and required capabilities, such as affordability, robustness, integration, etc.…”

Section: Allmentioning

confidence: 99%

Emerging MEMS and nano technologies: Fostering scholarship, STEM learning, discoveries and innovations in microsystems

Lyshevski

Puchades

Fuller

2012

2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO)

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We report scholarship and learning activities in Rochester Institute of Technology (RIT) in areas of micro electromechanical systems (MEMS) and nanotechnology. Microsystems may integrate microelectronics, nano and MEMS technologies and solutions. To enable integrated transformative scholarship and learning, fundamental and applied research is conducted at the state-of-the-art Microsystems Fabrication Facilities. Contributing to research in core areas of critical importance of science, technology, engineering and mathematics (STEM), undergraduate and graduate MEMS and Nanotechnology courses are developed and offered. The MEMS curriculum includes MEMS Design, MEMS Fabrication and MEMS Evaluation courses. The Nanotechnology curriculum comprises an undergraduate Nano Science, Engineering and Technology (NanoSET) course, as well as a graduate Fundamentals of Micro and Nano Engineering course. To meet overall and specific educational goals and objectives, we facilitate course and curriculum developments focusing on active learning, scholarship, effective teaching and pedagogy. These activities advance a STEM knowledge base. Our courses and educational activities positively contribute to STEM transformative developments. In order to enable learning and scholarship, faculty, professionals and students are engaged in discoveries, innovations and knowledge base generation. These attributes are achieved by means of advanced designs, analyses, fabrication and test of various MEMS and microsystems. Methods, concepts, tools and algorithms of computational and applied mathematics are used. Our research, capstone and laboratory projects enable STEM education, advance fundamental findings, facilitate research, support discoveries and enrich training. High-performance microsystems and MEMS are devised, designed, analysed, fabricated and evaluated. We advance technology readiness levels, ensure technology transfer and enable commercialization capacity.

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“…In general, there are two methodologies available to fabricate the released structures required for the piezoelectric energy harvesters. The first method relies upon surface micromachining techniques to undercut the released structures [ 4 , 10 , 11 , 12 , 13 , 14 ]. Typically, this method uses a sacrificial material and an etch stop, such as a Silicon-On-Insulator (SOI) wafer, to release the structural members of the device.…”

Section: Introductionmentioning

confidence: 99%

Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

Lueke

Badr

Lou

et al. 2015

Sensors

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This paper presents the methodology and challenges experienced in the microfabrication, packaging, and integration of a fixed-fixed folded spring piezoelectric energy harvester. A variety of challenges were overcome in the fabrication of the energy harvesters, such as the diagnosis and rectification of sol-gel PZT film quality and adhesion issues. A packaging and integration methodology was developed to allow for the characterizing the harvesters under a base vibration. The conditioning circuitry developed allowed for a complete energy harvesting system, consisting a harvester, a voltage doubler, a voltage regulator and a NiMH battery. A feasibility study was undertaken with the designed conditioning circuitry to determine the effect of the input parameters on the overall performance of the circuit. It was found that the maximum efficiency does not correlate to the maximum charging current supplied to the battery. The efficiency and charging current must be balanced to achieve a high output and a reasonable output current. The development of the complete energy harvesting system allows for the direct integration of the energy harvesting technology into existing power management schemes for wireless sensing.

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A novel microfabricated high precision vector magnetometer

Cited by 9 publications

References 7 publications

Silicon Nanowires Driving Miniaturization of Microelectromechanical Systems Physical Sensors: A Review

Silicon Nanowires Driving Miniaturization of Microelectromechanical Systems Physical Sensors: A Review

Emerging MEMS and nano technologies: Fostering scholarship, STEM learning, discoveries and innovations in microsystems

Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

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