A novel high-throughput fatigue testing method for metallic thin films

Burger, Sofie; Eberl, C.; Siegel, Alexander; Ludwig, Alfred; Kraft, O.

doi:10.1088/1468-6996/12/5/054202

Cited by 41 publications

(24 citation statements)

References 22 publications

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“…In contrast to other similar fatigue test machines (Ref 22,23), the real-time phase shift technique is used to keep the loading frequency equivalent to the resonance frequency for the whole duration of the fatigue test. The phase shift technique updates the immediate loading frequency based on the measured phase shift between excitation and deflection according to Fig.…”

Section: Methodsmentioning

confidence: 99%

Fatigue Crack Growth in Bodies with Thermally Sprayed Coating

et al. 2015

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Many applications of thermally sprayed coatings call for increased fatigue resistance of coated parts. Despite the intensive research in this area, the influence of coating on fatigue is still not completely understood. In this paper, the localization of crack initiation sites and the dynamics of crack propagation are studied. The resonance bending fatigue test was employed to test flat specimens with both sides coated. Hastelloy-X substrates coated with classical thermal barrier coating consisting of yttria stabilized zirconia and NiCoCrAlY layers. The strain distribution on the coating surface was evaluated by the Digital Image Correlation method through the whole duration of the fatigue test. Localization of crack initiation sites and the mode of crack propagation in the coated specimen are related to the observed resonance frequency. The individual phases of specimen degradation, i.e., the changes of material properties, crack initiation, and crack propagation, were identified. The tested coatings strongly influenced the first two phases, and the influence on the crack propagation was less significant. In general, the presented crack detection method can be used as a sensitive nondestructive testing method well suited for coated parts.

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Section: Methodsmentioning

confidence: 99%

Fatigue Crack Growth in Bodies with Thermally Sprayed Coating

et al. 2015

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“…These results can also be compared with thin film fatigue tests to further explore the size effects. 1 μm Cu thin films were sputter deposited on the Si cantilevers with dimensions of 10×1×0.2 mm 3 , and the cantilevers were then subjected to piezo actuation [40]. The failure criterion for the thin film samples needed to be chosen differently since the thin film is attached to the substrate.…”

Section: Experimental Investigation On Ofhc Cumentioning

confidence: 99%

Small-Scale Multiaxial Setup for Damage Detection Into the Very High Cycle Fatigue Regime

et al. 2015

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Micro electro mechanical systems, coatings, and thin films contain materials that are often subjected to complex loading conditions and high frequencies. Therefore, the implementation of a resonant multiaxial fatigue setup for small-scale samples is of high interest. Finite Element simulations have been used to design small-scale samples which possess very close bending and torsional resonant frequencies.The bending and torsional modes are excited by two piezo actuators working either in or out of phase with one another. The bending and torsional amplitudes are measured independently by a laser and the actuator amplitudes are controlled by a Field Programmable Gate Array. The fatigue setup can be used with a varying range of sample sizes from centimeters down to tens of micrometers. The novel multiaxial resonant micro fatigue setup as well as results (fatigue damage for Ni and lifetime for Cu) from bending small-scale fatigue tests are shown and discussed.

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“…The starting condition of the wafers before applying different photolithographic and structuring processes is a compound of a Si (100) wafer with a thickness of 525 µm, 0.3 µm thermal oxide (SiO 2 ), and a 0.1 µm low pressure chemical vapor deposition (LPCVD) nitride (Si 3 N 4 ) layer on top. The complete fabrication process of the stress sensors is described in detail elsewhere . The thickness of the cantilevers is 60 μm, the width of each cantilever is 400 μm and the length is varied from 800 to 3600 μm in steps of 400 μm.…”

Section: Materials and Diagnosticsmentioning

confidence: 99%

Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate

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Behm

Grochla

et al. 2015

Plasma Processes & Polymers

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Amorphous hydrogenated carbon (a‐C:H) deposited on steel with plasma enhanced chemical vapor deposition can be used as elongation tolerant oxygen barrier. However, the elongation tolerance of the a‐C:H film is lost if deposited on a poly(ethylene terephthalate) (PET) for reasons unknown. To assess this phenomenon, a‐C:H was deposited on PET, silicon substrates, and silicon micro‐cantilevers, and the stress was determined by measuring the radius of curvature. a‐C:H deposited on PET showed lower compressive stress than on silicon. This difference is not due to the formation of a gradient layer or plastic deformation of PET. Instead, the most probable explanation is that energetic ions cause a partial release of biaxial orientation within the PET, thereby reducing the compressive stress.

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A novel high-throughput fatigue testing method for metallic thin films

Cited by 41 publications

References 22 publications

Fatigue Crack Growth in Bodies with Thermally Sprayed Coating

Fatigue Crack Growth in Bodies with Thermally Sprayed Coating

Small-Scale Multiaxial Setup for Damage Detection Into the Very High Cycle Fatigue Regime

Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate

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