A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

Wang, Lei; Zhu, Wei; Wu, Zhipeng; Liu, Wenjuan; Sun, Chengliang

doi:10.1109/tuffc.2021.3090043

Cited by 9 publications

(5 citation statements)

References 36 publications

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“…The overlap of the frequency response curves of the PMUT arrays can be clearly observed. If PMUTs modulated with different bias voltages are reasonably coupled together, the bandwidth of PMUTs can be increased to a great extent [ 9 , 27 , 31 ], as shown in Figure 4 b. The fabricated PMUT device has a −6 dB bandwidth of 6.59 kHz.…”

Section: Results and Analysismentioning

confidence: 99%

“…Rozen et al [ 26 ] doubled the bandwidth by designing patterned wedge-shaped ribs on the PMUT to reduce the mass of the diaphragm while increasing the stiffness. Wang et al [ 27 ] proposed the use of a piston diaphragm on the central circular diaphragm to modify the PMUT, resulting in a remarkable improvement in transmission sound pressure and the frequency bandwidth of the modified transducer. Although these methods could extend the BW to some extent, they have the drawback of greatly increasing the complexity of the PMUT design or fabrication.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Zhang

Geng

et al. 2023

Micromachines

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Due to their excellent capabilities to generate and sense ultrasound signals in an efficient and well-controlled way at the microscale, piezoelectric micromechanical ultrasonic transducers (PMUTs) are being widely used in specific systems, such as medical imaging, biometric identification, and acoustic wireless communication systems. The ongoing demand for high-performance and adjustable PMUTs has inspired the idea of manipulating PMUTs by voltage. Here, PMUTs based on AlN thin films protected by a SiO2 layer of 200 nm were fabricated using a standard MEMS process with a resonant frequency of 505.94 kHz, a −6 dB bandwidth (BW) of 6.59 kHz, and an electromechanical coupling coefficient of 0.97%. A modification of 4.08 kHz for the resonant frequency and a bandwidth enlargement of 60.2% could be obtained when a DC bias voltage of −30 to 30 V was applied, corresponding to a maximum resonant frequency sensitivity of 83 Hz/V, which was attributed to the stress on the surface of the piezoelectric film induced by the external DC bias. These findings provide the possibility of receiving ultrasonic signals within a wider frequency range, which will play an important role in underwater three-dimensional imaging and nondestructive testing.

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Section: Results and Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Zhang

Geng

et al. 2023

Micromachines

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“…Tis numerical model is reliable to predict electric and acoustic performances, which is useful to optimize pMUT structures. Wang et al [13] proposed a piston diaphragm (PD) pMUT with the improved structure. Te geometrical parameters of two diferent piston diaphragms of the PD-pMUT were numerically studied and optimized by using COMSOL software.…”

Section: Introductionmentioning

confidence: 99%

Numerical Study of Acoustic‐Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Zhao

et al. 2023

Mathematical Problems in Engineering

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With the development of microelectromechanical technology, the piezoelectric micromechanical ultrasonic transducer (pMUT) for ultrasonic detection of gas-insulated switchgear (GIS) breakdown discharge has become possible. In this article, the ultrasonic-solid-pMUT coupling simulation model was established to investigate the propagation process of ultrasonic waves in GIS enclosure and the conversion between ultrasonic and electric signals through pMUT. The output electric signals for the unsimplified top electrode and simplified top electrode model were compared, and the structure of receiving pMUT was optimized according to the main ultrasonic frequency range of GIS breakdown discharge and the key performance parameters of pMUT. First, it is found that the simulation results of the ultrasonic-solid-pMUT coupling model are reliable, and the frequency of the output electric signal of receiving pMUT is consistent with the input signal, while the amplitude of output signal attenuates greatly. Second, simplifying the top electrode of pMUT may lead to relatively large errors in simulation results. The output response of simplified pMUT is obviously weakened, and the inherent frequency is higher. Furthermore, it is noted that the pMUT inherent frequency (f0) is inversely proportional to the radius (R) of the piezoelectric layer and directly proportional to the substrate thickness (dsi). When the coverage rate of the top electrode is between 30% and 80%, the pMUT effective electromechanical coupling coefficient ( K e f f 2 ) is high and has a maximum value. Finally, it is indicated that the pMUT with the optimum structure is suitable for the detection of GIS breakdown discharge ultrasonic signals, and the K e f f 2 can be improved by 106.7%.

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“…Furthermore, 3D PMUTs (curved and domed types) also show an improvement in transmitting performance. Wang et al presented a PMUT modified with a piston diaphragm [ 17 ]. Akhbari et al proposed a curved PMUT [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

Chen

Zhu

et al. 2022

Micromachines

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Piezoelectric micromachined ultrasonic transducers (PMUTs) are a promising alternative to conventional bulk piezoelectric ceramic-based ultrasonic transducers. However, the transmitting sensitivity of the reported PMUTs is far from satisfactory. In this paper, we report a beam-membrane coupled PMUT (BM-PMUT), which enhances the transmitting sensitivity via simultaneously increasing the acoustic emission areas and maintaining the comparable vibration amplitude. Experimental results show that the center and edge transmitting sensitivities of the BM-PMUT are 108.1 and 96 nm/V at 370 kHz, which are 109.9 and 49.6 nm/V at 677 kHz for the traditional PMUT (T-PMUT). Thus, the BM-PMUT realizes piston-like mode shapes and achieves around twofold improvement in the effective acoustic emission area relative to the traditional T-PMUT of the same size. Due to the larger acoustic emission areas and comparable vibration amplitudes, the normalized far-field sound pressure level of the BM-PMUT is 8.5 dB higher than that of the T-PMUT.

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A Novel Coupled Piezoelectric Micromachined Ultrasonic Transducer Based on Piston Mode

Cited by 9 publications

References 36 publications

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer

Numerical Study of Acoustic‐Electric Signal Conversion for GIS Discharge Detection and Structure Optimization for pMUT

Beam-Membrane Coupled Piezoelectric Micromachined Ultrasonic Transducers with Enhanced Transmitting Sensitivity

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