A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor

Nemirovsky, Y.; Stolyarova, Sara; Blank, Tanya; Bar-Lev, Sharon; Svetlitza, Alexander; Zviagintsev, Alex; Brouk, Igor

doi:10.1109/ted.2018.2878015

Cited by 17 publications

(20 citation statements)

References 14 publications

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“…The advantages of the innovative GMOS gas sensor are outlined in Part 1 and in Ref. [12]. These advantages of GMOS allow fabricating low-cost gas sensor that requires low power, and make it a promising technology for future smartphones, wearables, and IoT applications.…”

Section: Discussionmentioning

confidence: 99%

“…The miniaturization and reduced power consumption of gas sensors allow for a wide range of application in wearable and portable devices, such as mobile and smart phones. Recently we reported a miniature, combustion type gas sensor (dubbed GMOS) based on a thermal sensor, where a micro-machined CMOS-SOI transistor acts as a sensing element and is integrated with catalytic reaction plate and embedded heater [12][13][14][15][16]. The suspended transistor-dubbed TMOS exhibits extremely high sensitivity to the change of the temperature [17][18][19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

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A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

et al. 2020

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This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. Part 1 focused on the chemical and technological aspects of the sensor. In part 2, the emphasis is on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The three main challenges in designing the hot plate are addressed: (i) How to design a hot plate operating in air, with a low thermal conductivity; (ii) how to measure the temperature of the hot plate during operation; (iii) how to reduce the total consumed power during operation. Reported simulated as well as analytical models and measured results are in good agreement.

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

et al. 2020

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“…The fabrication of microthermal sensors using MEMS technology has shown great potential and several advantages, such as very low power consumption (

mW), higher sensitivities, lower detection limits (e.g., 4–20 ppm) [ 116 ], and faster response times (e.g., t < 15 s) [ 114 ]. Nonetheless, the miniaturization of these devices can be tedious and costly to deploy, which is an important concern for their easy and practical implementation [ 117 ].…”

Section: Gas Sensors For Vocs Detectionmentioning

confidence: 99%

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Ollé

Farré-Lladós

Casals‐Terré

2020

Sensors

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In recent years, advancements in micromachining techniques and nanomaterials have enabled the fabrication of highly sensitive devices for the detection of odorous species. Recent efforts done in the miniaturization of gas sensors have contributed to obtain increasingly compact and portable devices. Besides, the implementation of new nanomaterials in the active layer of these devices is helping to optimize their performance and increase their sensitivity close to humans’ olfactory system. Nonetheless, a common concern of general-purpose gas sensors is their lack of selectivity towards multiple analytes. In recent years, advancements in microfabrication techniques and microfluidics have contributed to create new microanalytical tools, which represent a very good alternative to conventional analytical devices and sensor-array systems for the selective detection of odors. Hence, this paper presents a general overview of the recent advancements in microfabricated gas sensors and microanalytical devices for the sensitive and selective detection of volatile organic compounds (VOCs). The working principle of these devices, design requirements, implementation techniques, and the key parameters to optimize their performance are evaluated in this paper. The authors of this work intend to show the potential of combining both solutions in the creation of highly compact, low-cost, and easy-to-deploy platforms for odor monitoring.

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“…We developed a sensor that meets all of the demands in one miniature solution. It is named GMOS, it was presented in [3][4][5] and shown in Figure 1. GMOS is based on a thermal sensor (named TMOS) that was invented by our group, and has been studied over the past decade [6][7][8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

“…GMOS sensor die with six pixels: Two serve as sensor operation controls (pixels "In" and "Ref"); "Blind" is the reference pixel for differential measurement; and there are three "Active" pixels with catalysts for multi-gas detection. The readout circuitry is reported in [3].…”

Section: Introductionmentioning

confidence: 99%

Reducing Food Waste with a Tiny CMOS-MEMS Gas Sensor, Dubbed GMOS

Shlenkevitch

Stolyarova

Blank

et al. 2020

7th International Electronic Conference on Sensors and Applications

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We present a tiny combustion-type gas sensor (named GMOS) fabricated using standard CMOS-SOI-MEMS technology. It is a low-cost thermal sensor with an embedded heater, catalytic layer and suspended transistor as a sensing element. The sensor principle relies on the combustion reaction of the gas that takes place on the catalytic layer. The exothermic combustion leads to a sensor temperature increase, which modifies the transistor current-voltage characteristics. The GMOS is useful for detecting different gases, such as ethanol, acetone and especially ethylene, as well as their mixtures. The sensor demonstrates an excellent sensitivity to ethylene of 40 mV/ppm and selective ethylene detection using nanoparticle catalytic layers of Pt, as well as TiO2. Along with its low energy consumption, GMOS is a promising technology for low-cost ethylene detection systems at different stages in the food supply chain, and it may help reduce global fruit and vegetable loss and waste.

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A New Pellistor-Like Gas Sensor Based on Micromachined CMOS Transistor

Cited by 17 publications

References 14 publications

A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

A Novel Miniature and Selective CMOS Gas Sensor for Gas Mixture Analysis—Part 2: Emphasis on Physical Aspects

Advancements in Microfabricated Gas Sensors and Microanalytical Tools for the Sensitive and Selective Detection of Odors

Reducing Food Waste with a Tiny CMOS-MEMS Gas Sensor, Dubbed GMOS

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