“…Once the branch capacitances values are known, the goal of the extraction technique is to determine the remaining capacitances C gdi , C gsi , C gse , C dsi , and C dse , which values are usually difficult to estimate. In the case of the HEMT GaN with silicon substrate (Si), the structure is symmetric under pinch‐off conditions; this allows assuming that C gsi = C gdi and C dsi ≌ 0 13,28 . However, this assumption cannot be applied to the SiC HEMT due to its asymmetric structure.…”