volume 32, issue 8, P524-528 1992
DOI: 10.1002/pen.760320803
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Abstract: Abstract Recent work has shown that moisture diffusion coefficients can be measured in thin polymer films through monitoring changes in permittivity with microdielectric sensors. The sensor is constructed in silicon and consists of an interdigitated electrode and two depletion mode field effect transistors. When operated in conjunction with appropriate external circuitry, the sensor measures dielectric constant and loss factor of any material placed on the SiO2 insulator and aluminum electrodes. The dielectri…

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